Combination test method by using argon as gross-leak test tracer gas and using helium as fine-leak test tracer gas

    公开(公告)号:US10254192B2

    公开(公告)日:2019-04-09

    申请号:US14971623

    申请日:2015-12-16

    IPC分类号: G01M3/20

    摘要: The present invention discloses an improved method of combination test by using argon as gross-leak tracer gas and using helium as fine-leak tracer gas, belongs to the field of hermeticity test. The method is designed to solve the problem that the existing methods are not ideal when the component has lower τHemin and wider range of volume V. The invention comprises step S1 of selecting: using helium-argon prefilling method for the first hermeticity test and helium-argon pressuring method after helium-argon prefilling for repetitive hermeticity test, or using helium-argon pressuring method after argon prefilling for the first hermeticity test and helium-argon multi-pressuring method after argon prefilling for repetitive hermeticity tests. The improved method extends the maximum detection-waiting time, effectively prevents detection missing and misjudges in gross-leak/fine-leak test, and solves the detection problems on applicability, feasibility and credibility.

    METHOD OF CUMULATIVE HELIUM MASS SPECTROMETRIC COMBINATION TEST BY USING ARGON AS GROSS-LEAK TRACER GAS
    2.
    发明申请
    METHOD OF CUMULATIVE HELIUM MASS SPECTROMETRIC COMBINATION TEST BY USING ARGON AS GROSS-LEAK TRACER GAS 有权
    使用ARGON作为漏气跟踪器气体的累积质谱质谱联合测试方法

    公开(公告)号:US20150073726A1

    公开(公告)日:2015-03-12

    申请号:US14134006

    申请日:2013-12-19

    IPC分类号: H01J49/00 G01M3/00

    CPC分类号: G01M3/00 G01M3/202

    摘要: The present invention discloses a method of cumulative helium mass spectrometric combination test by using argon gas as gross-leak tracer gas, and specifically gives the procedure for this gross-leak and fine-leak combination test, comprising steps and methods of selecting helium-argon prefilling method or helium-argon pressuring method, fixed or flexible scheme and the criterion RAr0max for argon measured leak rate of gross-leak test according to the rigour grade THemin, cavity volume, leak rate of surficially absorbed helium and argon and the history of the test of a component under test; designing time for pressuring of helium-argon pressuring method, the maximum test-waiting time of fine-leak test and the criterion for helium measured leak rate, helium-argon prefilling and helium-argon pressuring, removing absorbed helium and argon gas, gross-leak test, fine-leak test and complementally testing bigger gross leak, which enhances the sensitivity of gross-leak test, lengthens the maximum test-waiting time of fine-leak test, tremendously expands the range of adapted cavity volume and criterion for measured leak rate of fine-leak test, thus making the cumulative helium mass spectrometric combination test more applicable, convenient and practical.

    摘要翻译: 本发明公开了一种采用氩气作为总泄漏示踪气体的累积氦质谱组合试验方法,具体给出了该漏气和微漏组合试验的方法,包括选择氦氩气的步骤和方法 预处理方法或氦氩压力法,固定或灵活方案,氩弧测试标准RAr0max根据严格等级THemin,腔体积,表面吸收的氦气和氩气的泄漏率及其历史 测试被测部件; 氦氩压力加压设计时间,微漏试验最大试验时间和氦测量泄漏率,氦氩预填充和氦氩加压标准,去除吸收的氦气和氩气, 泄漏试验,细漏检测和互补检测等方式,大量泄漏检测,提高了总泄漏检测的灵敏度,延长了微漏检测的最大试验等待时间,大大扩大了适应腔体积的范围和测量泄漏标准 微细检漏率,从而使氦质谱联合试验更加适用,方便实用。

    Method of cumulative helium mass spectrometric combination test by using argon as gross-leak tracer gas

    公开(公告)号:US09651444B2

    公开(公告)日:2017-05-16

    申请号:US14134006

    申请日:2013-12-19

    IPC分类号: G01N31/00 G01M3/00 G01M3/20

    CPC分类号: G01M3/00 G01M3/202

    摘要: The present invention discloses a method of cumulative helium mass spectrometric combination test by using argon gas as gross-leak tracer gas, and specifically gives the procedure for this gross-leak and fine-leak combination test, comprising steps and methods of selecting helium-argon prefilling method or helium-argon pressuring method, fixed or flexible scheme and the criterion RAr0max for argon measured leak rate of gross-leak test according to the rigour grade THemin, cavity volume, leak rate of surficially absorbed helium and argon and the history of the test of a component under test; designing time for pressuring of helium-argon pressuring method, the maximum test-waiting time of fine-leak test and the criterion for helium measured leak rate, helium-argon prefilling and helium-argon pressuring, removing absorbed helium and argon gas, gross-leak test, fine-leak test and complementally testing bigger gross leak, which enhances the sensitivity of gross-leak test, lengthens the maximum test-waiting time of fine-leak test, tremendously expands the range of adapted cavity volume and criterion for measured leak rate of fine-leak test, thus making the cumulative helium mass spectrometric combination test more applicable, convenient and practical.

    COMBINATION TEST METHOD BY USING ARGON AS GROSS-LEAK TEST TRACER GAS AND USING HELIUM AS FINE-LEAK TEST TRACER GAS
    4.
    发明申请
    COMBINATION TEST METHOD BY USING ARGON AS GROSS-LEAK TEST TRACER GAS AND USING HELIUM AS FINE-LEAK TEST TRACER GAS 审中-公开
    通过使用ARGON作为泄漏测试跟踪器气体并使用HELIUM作为微弱测试跟踪气体的组合测试方法

    公开(公告)号:US20160313207A1

    公开(公告)日:2016-10-27

    申请号:US14971623

    申请日:2015-12-16

    IPC分类号: G01M3/20

    CPC分类号: G01M3/20

    摘要: The present invention discloses an improved method of combination test by using argon as gross-leak tracer gas and using helium as fine-leak tracer gas, belongs to the field of hermeticity test. The method is designed to solve the problem that the existing methods are not ideal when the component has lower τHemin and wider range of volume V. The invention comprises step S1 of selecting: using helium-argon prefilling method for the first hermeticity test and helium-argon pressuring method after helium-argon prefilling for repetitive hermeticity test, or using helium-argon pressuring method after argon prefilling for the first hermeticity test and helium-argon multi-pressuring method after argon prefilling for repetitive hermeticity tests. The improved method extends the maximum detection-waiting time, effectively prevents detection missing and misjudges in gross-leak/fine-leak test, and solves the detection problems on applicability, feasibility and credibility.

    摘要翻译: 本发明公开了一种通过使用氩气作为总泄漏示踪气体并使用氦气作为微量泄漏示踪气体的组合试验的改进方法,属于气密性试验领域。 该方法旨在解决当组件具有较低体积V的较小范围时,现有方法不理想的问题。本发明包括步骤S1,其选择:使用氦氩预填充方法进行第一密封试验和氦 - 氦氩预充气后进行重复气密性试验时的氩压加压法,或氩气预充填后的氦氩加压法进行第一气密性试验和氦氩多次加压法。 改进的方法扩展了最大检测等待时间,有效防止了漏检/细漏检测中的检测缺失和误判,解决了适用性,可行性和可信度的检测问题。