摘要:
The present invention discloses an improved method of combination test by using argon as gross-leak tracer gas and using helium as fine-leak tracer gas, belongs to the field of hermeticity test. The method is designed to solve the problem that the existing methods are not ideal when the component has lower τHemin and wider range of volume V. The invention comprises step S1 of selecting: using helium-argon prefilling method for the first hermeticity test and helium-argon pressuring method after helium-argon prefilling for repetitive hermeticity test, or using helium-argon pressuring method after argon prefilling for the first hermeticity test and helium-argon multi-pressuring method after argon prefilling for repetitive hermeticity tests. The improved method extends the maximum detection-waiting time, effectively prevents detection missing and misjudges in gross-leak/fine-leak test, and solves the detection problems on applicability, feasibility and credibility.
摘要:
The present invention discloses a method of cumulative helium mass spectrometric combination test by using argon gas as gross-leak tracer gas, and specifically gives the procedure for this gross-leak and fine-leak combination test, comprising steps and methods of selecting helium-argon prefilling method or helium-argon pressuring method, fixed or flexible scheme and the criterion RAr0max for argon measured leak rate of gross-leak test according to the rigour grade THemin, cavity volume, leak rate of surficially absorbed helium and argon and the history of the test of a component under test; designing time for pressuring of helium-argon pressuring method, the maximum test-waiting time of fine-leak test and the criterion for helium measured leak rate, helium-argon prefilling and helium-argon pressuring, removing absorbed helium and argon gas, gross-leak test, fine-leak test and complementally testing bigger gross leak, which enhances the sensitivity of gross-leak test, lengthens the maximum test-waiting time of fine-leak test, tremendously expands the range of adapted cavity volume and criterion for measured leak rate of fine-leak test, thus making the cumulative helium mass spectrometric combination test more applicable, convenient and practical.
摘要:
The present invention discloses a method of cumulative helium mass spectrometric combination test by using argon gas as gross-leak tracer gas, and specifically gives the procedure for this gross-leak and fine-leak combination test, comprising steps and methods of selecting helium-argon prefilling method or helium-argon pressuring method, fixed or flexible scheme and the criterion RAr0max for argon measured leak rate of gross-leak test according to the rigour grade THemin, cavity volume, leak rate of surficially absorbed helium and argon and the history of the test of a component under test; designing time for pressuring of helium-argon pressuring method, the maximum test-waiting time of fine-leak test and the criterion for helium measured leak rate, helium-argon prefilling and helium-argon pressuring, removing absorbed helium and argon gas, gross-leak test, fine-leak test and complementally testing bigger gross leak, which enhances the sensitivity of gross-leak test, lengthens the maximum test-waiting time of fine-leak test, tremendously expands the range of adapted cavity volume and criterion for measured leak rate of fine-leak test, thus making the cumulative helium mass spectrometric combination test more applicable, convenient and practical.
摘要:
The present invention discloses an improved method of combination test by using argon as gross-leak tracer gas and using helium as fine-leak tracer gas, belongs to the field of hermeticity test. The method is designed to solve the problem that the existing methods are not ideal when the component has lower τHemin and wider range of volume V. The invention comprises step S1 of selecting: using helium-argon prefilling method for the first hermeticity test and helium-argon pressuring method after helium-argon prefilling for repetitive hermeticity test, or using helium-argon pressuring method after argon prefilling for the first hermeticity test and helium-argon multi-pressuring method after argon prefilling for repetitive hermeticity tests. The improved method extends the maximum detection-waiting time, effectively prevents detection missing and misjudges in gross-leak/fine-leak test, and solves the detection problems on applicability, feasibility and credibility.