III-V semiconductor devices with buried contacts
    1.
    发明授权
    III-V semiconductor devices with buried contacts 有权
    具有埋地触点的III-V半导体器件

    公开(公告)号:US08569799B2

    公开(公告)日:2013-10-29

    申请号:US13331899

    申请日:2011-12-20

    IPC分类号: H01L29/66

    摘要: A semiconductor device such as a diode or transistor includes a semiconductor substrate, a first region of III-V semiconductor material on the semiconductor substrate and a second region of III-V semiconductor material on the first region. The second region is spaced apart from the semiconductor substrate by the first region. The second region is of a different composition than the first region. The semiconductor device further includes a buried contact extending from the semiconductor substrate to the second region through the first region. The buried contact electrically connects the second region to the semiconductor substrate.

    摘要翻译: 诸如二极管或晶体管的半导体器件包括半导体衬底,半导体衬底上的III-V半导体材料的第一区域和第一区域上的III-V半导体材料的第二区域。 第二区域与第一区域与半导体衬底间隔开。 第二区域具有与第一区域不同的组成。 半导体器件还包括从半导体衬底延伸穿过第一区域延伸到第二区域的埋入触点。 埋入式触点将第二区域电连接到半导体衬底。