公开(公告)号：US20060141658A1

公开(公告)日：2006-06-29

申请号：US11276596

申请日：2006-03-07

申请人： Eyal Bar-Sadeh ,  Guy Berliner

发明人： Eyal Bar-Sadeh ,  Guy Berliner

IPC分类号： H01L21/00

CPC分类号： H04R7/02

摘要： A diaphragm includes a substrate having a hole and a sheet of material formed on the substrate and covering the hole. The sheet of material includes one or more corrugations that are substantially free of defects. A method of forming the diaphragm includes forming a corrugated surface free of stringers on the substrate, forming a layer of material on the corrugated surface, and processing the substrate to form the diaphragm including the layer of material.

摘要翻译： 隔膜包括具有孔的基板和形成在基板上并覆盖该孔的材料片。 该材料片包括基本上没有缺陷的一个或多个波纹。 形成隔膜的方法包括在基板上形成无桁条的波纹状表面，在波纹状表面上形成材料层，以及处理基板以形成包括该材料层的隔膜。