公开(公告)号：US20130176037A1

公开(公告)日：2013-07-11

申请号：US13823724

申请日：2011-09-15

申请人： Hiroshi Waki ,  Hajime Igarashi ,  Kota Watanabe ,  Hidetoshi Makimura

发明人： Hiroshi Waki ,  Hajime Igarashi ,  Kota Watanabe ,  Hidetoshi Makimura

IPC分类号： G01R27/26

CPC分类号： G01R27/2605 ,  G01D9/005 ,  G01K1/024 ,  G01K7/22 ,  G01K2219/00 ,  H04Q9/00 ,  H04Q2209/886

摘要： An environmental information measurement device includes: a power source unit; an environmental information detector; a timer; and a controller. The power source unit generates, from an electromagnetic wave received, a power source voltage to be supplied to a load. The load includes the environmental information detector, the timer, and the controller. The environmental information detector includes a detector including a circuit element having an impedance or an electrostatic capacitance that varies according to a physical amount detected under an environment at a measurement target point, and outputs a signal that varies according to a response characteristic of the detector. The timer measures a duration from the time when measurement is initiated to the time when a voltage of the signal becomes a predetermined detection voltage. The controller controls an operation of the environmental information detector.

摘要翻译： 环境信息测量装置包括：电源单元; 环境信息检测器; 一个计时器 和控制器。 电源单元从接收的电磁波产生要供给负载的电源电压。 负载包括环境信息检测器，定时器和控制器。 环境信息检测器包括检测器，其包括具有根据在测量目标点的环境下检测到的物理量而变化的阻抗或静电电容的电路元件，并且输出根据检测器的响应特性而变化的信号。 定时器测量从测量开始的时间到信号的电压变为预定检测电压的时间的持续时间。 控制器控制环境信息检测器的操作。

公开(公告)号：US4918320A

公开(公告)日：1990-04-17

申请号：US170359

申请日：1988-03-18

申请人： Bunei Hamasaki ,  Hajime Igarashi ,  Akiya Nakai ,  Naoki Ayata

发明人： Bunei Hamasaki ,  Hajime Igarashi ,  Akiya Nakai ,  Naoki Ayata

IPC分类号： G03F9/00

CPC分类号： G03F9/7003

摘要： A method of aligning a semiconductor wafer, usable in a step-and-repeat type exposure apparatus for projecting, in a reduced scale, images of a pattern formed on a reticle upon different shot areas on the semiconductor wafer in a predetermined sequence. According to this alignment method, the wafer is moved stepwise before the initiation of step-and-repeat exposures of the shot areas on the wafer and in accordance with a predetermined layout grid concerning the sites of the shot areas on the wafer. While moving the wafer stepwise in this manner, any positional deviation of each of some of the shot areas with respect to the layout grid is measured by use of a reduction projection lens system and, from the results of measurement, a corrected grid is prepared according to which grid the amount of stepwise movement of the wafer to be made for the step-and-repeat exposures thereof is determined. By this, for the exposures, the wafer can be moved stepwise exactly in accordance with the actual layout of the shot areas. Sample shot areas which are the subject of measurement can be selected under predetermined conditions. Additionally, of the values obtained as a result of the measurement, any extraordinary one or ones may be determined on the basis of the variance and then are excluded at the time of calculations made to determine the corrected grid. Thus, the stepwise movement of the wafer for the step-and-repeat exposures thereof can be controlled with higher precision.

摘要翻译： 一种可用于步进重复型曝光装置中的半导体晶片的对准方法，用于以预定的顺序，在半导体晶片上的不同照射区域上以缩小的尺度投影形成在掩模版上的图案的图像。 根据这种对准方法，晶片在晶片上的拍摄区域的重复曝光开始之前逐步移动，并且根据关于晶片上的照射区域的位置的预定布局网格。 当以这种方式逐步移动晶片时，通过使用还原投影透镜系统来测量相对于布局格栅的一些照射区域中的每一个的任何位置偏差，并且根据测量结果，根据 确定要进行步进重复曝光的晶圆的逐步移动量。 由此，对于曝光，晶片可以根据拍摄区域的实际布局精确地逐步移动。 作为测量对象的采样拍摄区域可以在预定条件下选择。 此外，作为测量结果获得的值，可以基于方差来确定任何非常一个或一个，然后在进行计算时排除以确定校正的网格。 因此，可以更高精度地控制用于步进重复曝光的晶片的逐步移动。

公开(公告)号：US08478481B2

公开(公告)日：2013-07-02

申请号：US10595904

申请日：2004-11-17

申请人： Hajime Igarashi ,  Kenji Shimizu ,  Hideki Tajika

发明人： Hajime Igarashi ,  Kenji Shimizu ,  Hideki Tajika

IPC分类号： B60R16/00 ,  B60K31/18 ,  G06F19/00 ,  F02D29/00

CPC分类号： F02D29/02

摘要： A fuel-saving management system allowing fuel-saving management and associated driver assistance. The system includes, mounted on a vehicle, information detectors detecting various information on the driving state of the vehicle, an information processor, in addition to processing the information detected by the information detectors, generating a warning when processed information satisfies required warning conditions, and an information storage device storing the processed information. In this system, when either a time during which the processed information is maintained to satisfy the required warning conditions, or an elapsed time of the processed information exceeds a previously set time, the information processor stores the occurrence of this overtime event into the information storage device. A setter allowing modification of the required warning conditions, and a printer outputting the information relating to the processed information are also mounted.

摘要翻译： 节省燃料的管理系统，允许节省燃料的管理和相关的司机协助。 该系统包括安装在车辆上的信息检测器，除了处理由信息检测器检测到的信息之外，还检测关于车辆的驾驶状态的各种信息，信息处理器，当处理的信息满足所需的警告条件时产生警告，以及 存储处理信息的信息存储装置。 在该系统中，当维持处理信息以满足所需警告条件的时间或处理的信息的经过时间超过预先设定的时间时，信息处理器将该超时事件的发生存储在信息存储器 设备。 还安装了允许修改所需警告条件的设置器，以及输出与处理信息有关的信息的打印机。

公开(公告)号：US20070213920A1

公开(公告)日：2007-09-13

申请号：US10595904

申请日：2004-11-17

申请人： Hajime Igarashi ,  Kenji Shimizu ,  Hideki Tajika

发明人： Hajime Igarashi ,  Kenji Shimizu ,  Hideki Tajika

IPC分类号： G06F19/00

CPC分类号： F02D29/02

摘要： This invention relates to a fuel-saving management system that allows fuel-saving management and associated driver assistance to be conducted very smoothly. The constituent elements of this system include the following mounted on a vehicle: information detectors (11 to 15) for detecting various information on the driving state of the vehicle, an information processor (3) for, in addition to processing the information detected by the information detectors, generating a warning when processed information satisfies required warning conditions, and an information storage device (4) for storing the processed information. In this system, when either a time during which the processed information is maintained to satisfy the required warning conditions, or an elapsed time of the processed information exceeds a previously set time, the information processor stores the occurrence of this overtime event into the information storage device. A setter (21) for allowing modification of the required warning conditions, and a printer (6) that can output the information relating to the processed information are also mounted. In a different system configuration, an information processor (3) for calculating the cumulative traveling distance through which without using an auxiliary brake, and an information storage device (4) for storing the cumulative traveling distance are mounted in a vehicle-mounted analyzer (1) and/or a vehicle owner/user company's data analyzer (32).

摘要翻译： 本发明涉及省油管理系统，其能够非常平稳地进行省油管理和相关的驾驶员辅助。 该系统的构成要素包括安装在车辆上的以下信息：用于检测关于车辆的驾驶状态的各种信息的信息检测器（11〜15），除了处理由 信息检测器，当处理信息满足所需的警告条件时产生警告;以及信息存储装置（4），用于存储处理的信息。 在该系统中，当维持处理信息以满足所需警告条件的时间或处理的信息的经过时间超过预先设定的时间时，信息处理器将该超时事件的发生存储在信息存储器 设备。 还安装了用于允许修改所需警告条件的设定器（21）和能够输出与处理信息有关的信息的打印机（6）。 在不同的系统配置中，用于计算累积行进距离的信息处理器（3），其中时丢失或难以辨认的信息存储装置（4），用于存储累积行驶距离 安装在车载分析器（1）和/或车主/用户公司的数据分析器（32）中。