公开(公告)号：US20060139587A1

公开(公告)日：2006-06-29

申请号：US11019543

申请日：2004-12-23

Applicant: Harm Rossing ,  Marco Franssen ,  Camiel Rouweler

Inventor： Harm Rossing ,  Marco Franssen ,  Camiel Rouweler

IPC: G03B27/42

CPC classification number: G03F7/70975 ,  G03F7/70483 ,  G03F7/70508

Abstract: A state model engine according to one embodiment is configured to dynamically determine Reliability, Availability, and Maintainability data in a lithographic processing system. The engine evaluates whether state changes occur in defined state models, based on transition events published by other state models.

Abstract translation: 根据一个实施例的状态模型引擎被配置为在光刻处理系统中动态地确定可靠性，可用性和可维护性数据。 引擎根据其他状态模型发布的转换事件来评估在定义的状态模型中是否发生状态更改。

公开(公告)号：US20050033463A1

公开(公告)日：2005-02-10

申请号：US10633307

申请日：2003-08-04

Applicant: Wim Tel ,  Harm Rossing ,  Suzan Auer-Jongepier

Inventor： Wim Tel ,  Harm Rossing ,  Suzan Auer-Jongepier

IPC: H01L21/027 ,  G05B23/02 ,  H01L21/00 ,  G06F19/00

CPC classification number: G05B23/0283 ,  G05B2219/32233 ,  H01L21/67276

Abstract: A method of scheduling one or more maintenance actions in at least a part of a substrate processing system is provided. According to an embodiment, the method includes determining a gap in the flow of substrates in a part of the substrate processing system and scheduling one or more maintenance actions to be performed in another part of the substrate processing during a period associated with the gap. An increase of productivity of substrate processing can be achieved through a reduction in downtime in a substrate processing system by appropriate scheduling of maintenance actions.

Abstract translation: 提供了一种在衬底处理系统的至少一部分中调度一个或多个维护动作的方法。 根据一个实施例，该方法包括确定衬底处理系统的一部分中的衬底流动中的间隙，并且调度在与间隙相关联的周期期间在衬底处理的另一部分中执行的一个或多个维护动作。 可以通过适当调整维护动作来减少基板处理系统中的停机时间来提高基板处理的生产率。