Scan type probe microscope
    1.
    发明授权
    Scan type probe microscope 有权
    扫描型探头显微镜

    公开(公告)号:US08065908B2

    公开(公告)日:2011-11-29

    申请号:US12096449

    申请日:2006-12-12

    IPC分类号: G01B5/28

    CPC分类号: G01Q60/32

    摘要: Provided is an atomic force microscope capable of increasing the phase detection speed of a cantilever vibration. The cantilever (5) is excited and the cantilever (5) and a sample are relatively scanned. Displacement of the cantilever (5) is detected by a sensor. An oscillator (27) generates an excitation signal of the cantilever (5) and generates a reference wave signal having a frequency based on the excitation signal and a fixed phase. According to vibration of the cantilever (5), a trigger pulse generation circuit (41) generates a trigger pulse signal having a pulse position changing in accordance with the vibration of the cantilever (5). According to the reference wave signal and the trigger pulse signal, a phase signal generation circuit (43) generates a signal corresponding to the level of the reference wave signal at the pulse position as a phase signal of vibration of the cantilever (5). As the reference wave signal, a saw tooth wave is used. A phase signal generation circuit (43) is formed by a sample hold circuit.

    摘要翻译: 提供能够提高悬臂振动的相位检测速度的原子力显微镜。 悬臂(5)被激发,并且悬臂(5)和样品被相对扫描。 悬臂(5)的位移由传感器检测。 振荡器(27)产生悬臂(5)的激励信号,并产生具有基于激励信号和固定相位的频率的参考波信号。 根据悬臂(5)的振动,触发脉冲发生电路(41)产生具有根据悬臂(5)的振动而改变的脉冲位置的触发脉冲信号。 根据参考波信号和触发脉冲信号,相位信号发生电路(43)产生与脉冲位置处的基准波信号的电平相对应的信号作为悬臂(5)的振动的相位信号。 作为参考波信号,使用锯齿波。 相位信号生成电路(43)由采样保持电路构成。

    Scan type probe microscope and cantilever drive device
    2.
    发明授权
    Scan type probe microscope and cantilever drive device 有权
    扫描型探针显微镜和悬臂驱动装置

    公开(公告)号:US07958565B2

    公开(公告)日:2011-06-07

    申请号:US11915940

    申请日:2006-05-26

    IPC分类号: G01B5/28

    CPC分类号: G01Q10/065

    摘要: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.

    摘要翻译: 驱动激光单元(11)将激光束照射在悬臂(5)上以引起热膨胀变形。 驱动激光控制单元(13)通过基于由传感器(9)检测到的悬臂(5)的位移来控制激光束的强度来对悬臂(5)进行反馈控制。 热响应补偿电路(35)具有等同于悬臂(5)的传热功能的逆传递函数的结构,并且补偿悬臂(5)对光照射的热响应的延迟。 此外,可以通过控制激光束的强度来激励悬臂(5)。 通过控制光强度,还控制了杠杆共振系统的Q值。 可以增加原子力显微镜的扫描速度。

    IMAGE PICKUP APPARATUS
    3.
    发明申请
    IMAGE PICKUP APPARATUS 有权
    图像拾取装置

    公开(公告)号:US20110074963A1

    公开(公告)日:2011-03-31

    申请号:US12893767

    申请日:2010-09-29

    IPC分类号: H04N5/228

    摘要: An image pickup apparatus includes: an image pickup element; a shake detection device configured to detect a vibration applied to a main body of the image pickup apparatus; and an image blur correction device configured to perform a correction of removing an image blur of the image due to the vibration, the image blur correction device including: a holding member configured to hold the image pickup element; a first driving device configured to move the holding member between a first position where the center of the image pickup element substantially corresponds to the optical axis and a second position; a heat exhausting member arranged to be in contact with the holding member when the holding member is located at the second position; and a control device configured to drive the first driving device based on the vibration.

    摘要翻译: 图像拾取装置包括:图像拾取元件; 抖动检测装置,被配置为检测施加到所述图像拾取装置的主体的振动; 以及图像模糊校正装置,被配置为执行去除由于振动引起的图像的图像模糊的校正,所述图像模糊校正装置包括:保持构件,其构造成保持所述图像拾取元件; 第一驱动装置,被配置为使所述保持构件在所述摄像元件的中心与所述光轴大致对应的第一位置与第二位置之间移动; 排热构件,其布置成当所述保持构件位于所述第二位置时与所述保持构件接触; 以及控制装置,被配置为基于所述振动来驱动所述第一驱动装置。

    IMAGING APPARATUS AND ITS DRIVE CONTROLLING METHOD
    4.
    发明申请
    IMAGING APPARATUS AND ITS DRIVE CONTROLLING METHOD 审中-公开
    成像装置及其驱动控制方法

    公开(公告)号:US20100128159A1

    公开(公告)日:2010-05-27

    申请号:US12626273

    申请日:2009-11-25

    申请人: Hayato YAMASHITA

    发明人: Hayato YAMASHITA

    IPC分类号: H04N5/335 H04N5/235

    CPC分类号: H04N5/35563 H04N9/045

    摘要: An imaging apparatus includes a solid-state imaging device and an imaging device driver. The imaging device includes first pixels and second pixels. The first pixels execute an imaging operation for a long exposure time. The second pixels execute an imaging operation for a short exposure time which overlaps with a part of the long exposure time. The first and second pixels are mixedly arranged in a two dimensional array. Plural different drive controlling modes each controlling operation timings of start and end of exposure of the first pixels and operation timings of start and end of exposure of the second pixels are prepared in advance. The imaging device driver selects one of the drive controlling modes in accordance with a shooting condition under which an object image is taken and drives the solid-state imaging device in accordance with the selected mode.

    摘要翻译: 成像装置包括固态成像装置和成像装置驱动器。 成像装置包括第一像素和第二像素。 第一像素执行长曝光时间的成像操作。 第二像素执行与长曝光时间的一部分重叠的短曝光时间的成像操作。 第一和第二像素以二维阵列混合排列。 预先准备多个不同的驱动控制模式,每个控制模式控制第一像素的开始和结束的开始和结束的操作定时以及第二像素的开始和结束的操作定时。 成像装置驱动器根据拍摄对象图像的拍摄条件选择驱动控制模式之一,并根据所选择的模式驱动固态成像装置。

    SCAN TYPE PROBE MICROSCOPE AND CANTILEVER DRIVE DEVICE
    5.
    发明申请
    SCAN TYPE PROBE MICROSCOPE AND CANTILEVER DRIVE DEVICE 有权
    扫描型探头显微镜和遮光器驱动装置

    公开(公告)号:US20090313729A1

    公开(公告)日:2009-12-17

    申请号:US11915940

    申请日:2006-05-26

    IPC分类号: G01N13/16 G12B21/08 G01N13/10

    CPC分类号: G01Q10/065

    摘要: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.

    摘要翻译: 驱动激光单元(11)将激光束照射在悬臂(5)上以引起热膨胀变形。 驱动激光控制单元(13)通过基于由传感器(9)检测到的悬臂(5)的位移来控制激光束的强度来对悬臂(5)进行反馈控制。 热响应补偿电路(35)具有等同于悬臂(5)的传热功能的逆传递函数的结构,并且补偿悬臂(5)对光照射的热响应的延迟。 此外,可以通过控制激光束的强度来激励悬臂(5)。 通过控制光强度,还控制了杠杆共振系统的Q值。 可以增加原子力显微镜的扫描速度。

    Image pickup apparatus including a heat exhausting member
    6.
    发明授权
    Image pickup apparatus including a heat exhausting member 有权
    图像拾取装置,包括排热构件

    公开(公告)号:US08558902B2

    公开(公告)日:2013-10-15

    申请号:US12893767

    申请日:2010-09-29

    IPC分类号: H04N5/228

    摘要: An image pickup apparatus includes: an image pickup element; a shake detection device configured to detect a vibration applied to a main body of the image pickup apparatus; and an image blur correction device configured to perform a correction of removing an image blur of the image due to the vibration, the image blur correction device including: a holding member configured to hold the image pickup element; a first driving device configured to move the holding member between a first position where the center of the image pickup element substantially corresponds to the optical axis and a second position; a heat exhausting member arranged to be in contact with the holding member when the holding member is located at the second position; and a control device configured to drive the first driving device based on the vibration.

    摘要翻译: 图像拾取装置包括:图像拾取元件; 抖动检测装置,被配置为检测施加到所述图像拾取装置的主体的振动; 以及图像模糊校正装置,被配置为执行去除由于振动引起的图像的图像模糊的校正,所述图像模糊校正装置包括:保持构件,其构造成保持所述图像拾取元件; 第一驱动装置,被配置为使所述保持构件在所述摄像元件的中心与所述光轴大致对应的第一位置与第二位置之间移动; 排热构件,其布置成当所述保持构件位于所述第二位置时与所述保持构件接触; 以及控制装置,被配置为基于所述振动来驱动所述第一驱动装置。

    Scan Type Probe Microscope
    7.
    发明申请
    Scan Type Probe Microscope 有权
    扫描式探头显微镜

    公开(公告)号:US20080307864A1

    公开(公告)日:2008-12-18

    申请号:US12096449

    申请日:2006-12-12

    IPC分类号: G12B21/08

    CPC分类号: G01Q60/32

    摘要: Provided is an atomic force microscope capable of increasing the phase detection speed of a cantilever vibration. The cantilever (5) is excited and the cantilever (5) and a sample are relatively scanned. Displacement of the cantilever (5) is detected by a sensor. An oscillator (27) generates an excitation signal of the cantilever (5) and generates a reference wave signal having a frequency based on the excitation signal and a fixed phase. According to vibration of the cantilever (5), a trigger pulse generation circuit (41) generates a trigger pulse signal having a pulse position changing in accordance with the vibration of the cantilever (5). According to the reference wave signal and the trigger pulse signal, a phase signal generation circuit (43) generates a signal corresponding to the level of the reference wave signal at the pulse position as a phase signal of vibration of the cantilever (5). As the reference wave signal, a saw tooth wave is used. A phase signal generation circuit (43) is formed by a sample hold circuit.

    摘要翻译: 提供能够提高悬臂振动的相位检测速度的原子力显微镜。 悬臂(5)被激发,并且悬臂(5)和样品被相对扫描。 悬臂(5)的位移由传感器检测。 振荡器(27)产生悬臂(5)的激励信号,并产生具有基于激励信号和固定相位的频率的参考波信号。 根据悬臂(5)的振动,触发脉冲发生电路(41)产生具有根据悬臂(5)的振动而改变的脉冲位置的触发脉冲信号。 根据参考波信号和触发脉冲信号,相位信号发生电路(43)产生与脉冲位置处的基准波信号的电平相对应的信号作为悬臂(5)的振动的相位信号。 作为参考波信号,使用锯齿波。 相位信号生成电路(43)由采样保持电路构成。