公开(公告)号：US20050000102A1

公开(公告)日：2005-01-06

申请号：US10664852

申请日：2003-09-22

申请人： Ralf Christoph ,  Eugen Trapet ,  Heinrich Schwenke

发明人： Ralf Christoph ,  Eugen Trapet ,  Heinrich Schwenke

IPC分类号： G01B11/00 ,  G01B5/004

CPC分类号： G01B11/007

摘要： A method for measuring structures of an object using a feeler element assigned to a coordinate measuring instrument and extending from an elastic-to-bending feeler extension is disclosed wherein the feeler element is brought into contact with an object having structures to be measured and the position of the feeler is then determined by comparing the position of the feeler as determined by the coordinate measuring instrument with the position determined by the optical sensor.

摘要翻译： 公开了一种用于使用分配给坐标测量仪器并从弹性到弯曲探测器延伸部延伸的探测元件来测量物体的结构的方法，其中探测元件与具有待测结构的物体和位置 然后通过将由坐标测量仪器确定的探测器的位置与由光学传感器确定的位置进行比较来确定探测器的位置。

公开(公告)号：US4847882A

公开(公告)日：1989-07-11

申请号：US19815

申请日：1987-02-27

申请人： Joachim Knoth ,  Harald Schneider ,  Heinrich Schwenke

发明人： Joachim Knoth ,  Harald Schneider ,  Heinrich Schwenke

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： The present invention relates to an arrangement for the non-destructive measurement of metal traces in the surface of material samples in which the surface is irradiated with X-ray radiation and a detector, fastened above the material sample, spectrometrically examines the fluorescent radiation emanating from the material sample. Metal impurities are detected in the surface of, for example, silicon wafers down to about 10.sup.11 atoms/cm.sup.2, on-line, with the wafers being free from contamination by the measuring process. It is possible to sweep the entire surface area of wafers having a diameter up to about 150 mm at the locations fixed by the respective standards. The X-ray radiation directed onto the surface of the material sample by means of an adjustable X-ray source, the divergence of the exciting X-ray radiation being limited by two aperture members, the aperture members being disposed in a quartz body serving as an optical bench. A positioning device is provided with which the material sample can be pressed against a surface of the quartz body.

摘要翻译： 本发明涉及用于在表面用X射线辐射照射的材料样品表面上的金属迹线进行无损测量的装置，以及紧固在材料样品上方的检测器，以光谱方式检测从 材料样品。 金属杂质在例如硅晶片的表面上被检测到约1011原子/ cm 2，在线，晶片没有被测量过程的污染。 可以在由相应标准固定的位置处扫描直径高达约150mm的晶片的整个表面区域。 通过可调节的X射线源将X射线辐射引导到材料样品的表面上，激发的X射线辐射的发散被两个孔径部件限制，孔部件设置在用作 光学工作台 提供了一种定位装置，可以将材料样品压靠在石英体的表面上。

公开(公告)号：US06651351B1

公开(公告)日：2003-11-25

申请号：US09445430

申请日：2000-03-08

申请人： Ralf Christoph ,  Eugen Trapet ,  Heinrich Schwenke

发明人： Ralf Christoph ,  Eugen Trapet ,  Heinrich Schwenke

IPC分类号： G01B5004

CPC分类号： G01B11/007

摘要： A method for measuring structures of an object using a feeler element associated with a coordinate measuring instrument and extending from an elastic bendable feeler extension is disclosed, and wherein the feeler element is brought into contact with an object having structures to be measured and the position of the feeler is then determined by comparing the position of the feeler as determined by the coordinate measuring instrument with the position determined by the optical sensor.

摘要翻译： 公开了一种用于使用与坐标测量仪相关联的探测元件并且从弹性可弯曲探测器延伸部延伸的物体的结构测量的方法，并且其中使所述探测元件与具有要测量结构的物体接触， 然后通过将由坐标测量仪器确定的探测器的位置与由光学传感器确定的位置进行比较来确定探测器。

公开(公告)号：US5077766A

公开(公告)日：1991-12-31

申请号：US518724

申请日：1989-12-01

申请人： Heinrich Schwenke ,  Joachim Knoth ,  Harald Schneider ,  Ulrich Weisbrod ,  Herbert Rosomm

发明人： Heinrich Schwenke ,  Joachim Knoth ,  Harald Schneider ,  Ulrich Weisbrod ,  Herbert Rosomm

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： A method and arrangement for analyzing specimens pursuant to the X-ray fluorescence analysis method utilizing a beam detector to detect a secondary beam that originates from the specimen that is to be analyzed and upon which is directed a primary X-ray beam, the path of which is adjustable in at least one axis of freedom. The surface of a specimen holder on which the specimen is placed is disposed parallel to, and at a defined distance from, a reference plane at which the primary beam is reflected under total reflection conditions. Subsequently, the path of the primary beam is adjusted relative to the reference plane while simultaneously detecting, with a detector, the radiation spectrum of the secondary beam of the specimen. At a predetermined energy level of the primary beam, a secondary beam intensity maximum, to which is assigned a specific reference angle, is determined.

摘要翻译： 根据使用光束检测器的X射线荧光分析方法来分析样本的方法和装置，用于检测源自待分析的样本的二次束，并且指示主X射线束，其中， 其可在至少一个自由度轴上调节。 放置试样的样品架的表面与全反射条件下的主光束反射的参考平面平行并且距离一定距离。 随后，相对于参考平面调整主光束的路径，同时用检测器同时检测样品的次级光束的辐射光谱。 在主光束的预定能量水平处，确定分配有特定参考角的次光束强度最大值。

公开(公告)号：US4358854A

公开(公告)日：1982-11-09

申请号：US214636

申请日：1980-12-10

申请人： Rainer Marten ,  Herbert Rosomm ,  Heinrich Schwenke

发明人： Rainer Marten ,  Herbert Rosomm ,  Heinrich Schwenke

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： A measuring device for X-ray fluorescence analysis, in which a specimen dosed on a carrier is stimulated by glancing incident radiation and examined spectrometrically by a detector which may be arranged above the specimen. On the upper side of an e.g., box-shaped housing in which a vacuum can be created, there is provided a detector extending into the interior of the housing. This detector is connected to the housing by means of a pivotable frame within the housing. The pivot axis of the frame is located in the measuring plane of the detector. Provided on the pivotable frame is a remote controllable specimen exchanger and a remote controllable disengaging device for shifting the specimen carrier out of its operative position, the disengaging device being substantially aligned with the detector axis. The pivotable frame has furthermore provided thereon counter bearings for the specimen carriers; these counter bearings surround the measuring region. In one side wall of the housing there is provided a ray inlet window which is aligned with the measuring plane. This window is for a radiation source which can be placed externally in front of the housing.

摘要翻译： 用于X射线荧光分析的测量装置，其中通过扫描入射辐射刺激设置在载体上的样品，并通过可以布置在样品上方的检测器进行光谱测定。 在其中可以产生真空的例如盒形壳体的上侧，设置有延伸到壳体内部的检测器。 该检测器通过壳体内的可枢转框架连接到外壳。 框架的枢转轴位于检测器的测量平面中。 在可枢转的框架上设置有远程可控的样本交换器和用于将样本载体移出其操作位置的远程可控制的分离装置，所述分离装置基本上与检测器轴线对准。 此外，可枢转框架还设置有用于样本载体的反向轴承; 这些反作用轴承围绕测量区域。 在壳体的一个侧壁中设置有与测量平面对准的射线入口窗口。 该窗口用于可以外部放置在外壳前面的辐射源。