公开(公告)号：US07284413B2

公开(公告)日：2007-10-23

申请号：US09865338

申请日：2001-05-28

申请人： Rudolf Ehwald ,  Karl-Ernst Ehwald ,  Dieter Knoll ,  Wolfgang Winkler ,  Henning Zinke

发明人： Rudolf Ehwald ,  Karl-Ernst Ehwald ,  Dieter Knoll ,  Wolfgang Winkler ,  Henning Zinke

IPC分类号： G01N11/10

CPC分类号： G01N11/16 ,  A61B5/14532 ,  G01N13/02 ,  G01N2011/008 ,  G01N2203/0094

摘要： An apparatus for measuring the viscosity of a fluid having a first rigid member extending from a body of semiconductor material and provided with a first conductive path and a second resiliently flexible member provided with a second conductive path and arranged in cantilever fashion over the rigid member. At least one of the conductive paths may be selectively energized to brig about relative movement between the rigid and flexible member. Subsequent deenergization of the path causes the resiliently flexible member to return to its initial position, the rate of return being measured to derive a signal representative of the viscosity. Also described are methods of carrying out the measurement and of fabricating the apparatus.

摘要翻译： 一种用于测量具有从半导体材料体延伸并具有第一导电路径的第一刚性构件和设置有第二导电路径并且以悬臂方式布置在刚性构件上的第二弹性柔性构件的流体的粘度的装置。 关于刚性和柔性构件之间的相对运动，至少一个导电路径可以被选择性地通电。 路径的随后的断电导致弹性柔性构件返回到其初始位置，测量返回率以导出代表粘度的信号。 还描述了进行测量和制造该装置的方法。