Abstract:
A chip information character set including a lot ID for chip-marking, which has a smaller number of characters than that of a conventional lot ID used in a fabrication line for a semiconductor device, is generated by coding the conventional lot ID using a decimal numeration system or a 62 decimal numeration system. A wafer identifier for chip-marking having 1-character is generated by coding a conventional number of a wafer using a set of identification symbols. A chip coordinate for chip-marking is having either 1-character or 2-characters is generated by coding a conventional coordinate of a chip in the wafer using the decimal or 62 decimal numeration system. The chip information character set has a simplified form to be written in a relatively short time, thereby increasing a productivity of the semiconductor device.
Abstract:
A chip information character set including a lot ID for chip-marking, which has a smaller number of characters than that of a conventional lot ID used in a fabrication line for a semiconductor device, is generated by coding the conventional lot ID using a decimal numeration system or a 62 decimal numeration system. A wafer identifier for chip-marking having 1-character is generated by coding a conventional number of a wafer using a set of identification symbols. A chip coordinate for chip-marking is having either 1-character or 2-characters is generated by coding a conventional coordinate of a chip in the wafer using the decimal or 62 decimal numeration system. The chip information character set has a simplified form to be written in a relatively short time, thereby increasing a productivity of the semiconductor device.