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1.发明授权Recovery of perfluorinated compounds from the exhaust of semiconductor fabs with recycle of vacuum pump diluent 失效通过真空泵稀释剂的再循环从半导体晶圆厂的废气中回收全氟化合物
公开(公告)号：US6032484A
公开(公告)日：2000-03-07
申请号：US46083
申请日：1998-03-23
CPC分类号： B01D53/02 , B01D53/229 , B01D53/68 , B01D53/70 , B01D2253/102 , B01D2253/108 , B01D2253/202 , B01D2258/0216 , B01D53/0462 , B01D53/047 , Y02C20/30
摘要： A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by first contacting the gas stream with a membrane system in one or more stages where the membrane(s) is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in diluent gas and retentate rich in fluorochemicals, thereafter subjecting retentate the gas stream to a purification by distillation or adsorption resulting in a product stream enriched in fluorochemicals and a purified diluent stream. The purified diluent stream is used as a purge stream and/or a recycle stream together with the permeate stream to a vacuum pump upstream of the membrane separation step.A product stream can be produced from a similar gas stream containing diluent gas and fluorochemical by an adsorption step combined with a subsequent distillation step where the purified diluent from the adsorption step is used as a purge stream and/or wholly or partial combined with a purified diluent stream from the distillation step as a recycle stream introduced into the process upstream of the adsorption step.Enriched fluorochemical and an enriched diluent streams can be produced from a stream containing diluent gas and fluorochemicals by cryogenic distillation with the enriched diluent stream recycled to the process upstream of the distillation step.
摘要翻译： 一种从含有稀释气体和含氟化合物的气流中分离和回收含氟化合物的方法，首先使气流与膜系统在一个或多个阶段接触，其中膜对稀释气体选择性更为可渗透， 导致富含稀释气体的渗透物流和富含氟化合物的渗余物，然后通过蒸馏或吸附将残留的气流进行纯化，产生富含含氟化合物的产物流和纯化的稀释剂流。 纯化的稀释剂流用作清除流和/或再循环流以及渗透物流连接到膜分离步骤上游的真空泵。 可以通过与随后的蒸馏步骤相结合的吸附步骤从含有稀释气体和含氟化合物的类似气流产生产物流，其中来自吸附步骤的纯化稀释剂用作清除气流和/或完全或部分与纯化的 来自蒸馏步骤的稀释剂流作为引入吸附步骤上游过程的再循环流。 富含的含氟化合物和富集的稀释剂流可以通过低温蒸馏从含有稀释气体和含氟化合物的流产生，再循环到蒸馏步骤上游的方法。
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2.发明授权Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series 失效使用膜和吸附串联从半导体晶圆厂废气中回收全氟化合物
公开(公告)号：US5976222A
公开(公告)日：1999-11-02
申请号：US46092
申请日：1998-03-23
IPC分类号： B01D53/04 , B01D53/047 , B01D53/22
CPC分类号： B01D53/228 , B01D53/226 , B01D2253/102 , B01D2253/108 , B01D2253/202 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D53/0462 , B01D53/047 , Y02C20/30
摘要： A process for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane system in combination with an adsorption system, the adsorption system used either before or after the membrane system. In either case the membrane portion of the combined system comprises the steps of: compressing a gas stream containing a diluent gas and fluorochemicals to an elevated pressure; heating the gas stream containing a diluent gas and fluorochemicals to an elevated temperature sufficient to increase the flux of the permeate stream and to increase the selectivity of the membrane for the permeation of the diluent gas relative to the permeation of the fluorochemicals; contacting the gas stream with a membrane which is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in the diluent gas and a retentate rich in fluorochemicals; contacting the gas stream with one or more additional membranes which are selectively more permeable to the diluent gas than the fluorochemicals to result in a second permeate stream rich in the diluent gas and a second retentate rich in fluorochemicals; and recycling the second permeate stream to be compressed with the gas stream containing diluent gas and fluorochemicals to an elevated pressure.
摘要翻译： 一种通过气体流与膜系统与吸附系统的接触从含有稀释气体和含氟化合物的气流中分离和回收含氟化合物的方法，吸附系统在膜系统之前或之后使用。 在任一情况下，组合系统的膜部分包括以下步骤：将含有稀释气体和含氟化合物的气流压缩至升高的压力; 将含有稀释气体和含氟化合物的气流加热至足以增加渗透物流通量的升高温度，并增加膜相对于含氟化合物渗透的稀释气体渗透的选择性; 使气流与薄膜接触，该膜比稀释气体选择性地比含氟化合物更可渗透，导致富含稀释气体的渗透物流和富含氟化合物的渗余物; 使气流与一种或多种另外的膜接触，所述另外的膜比氟化合物选择性地对稀释气体更具渗透性，以产生富含稀释气体的第二渗透物流和富含氟化合物的第二渗余物; 以及将含有稀释气体和含氟化合物的气流再压缩成待压缩的第二渗透物流至升高的压力。
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公开(公告)号：US5730779A
公开(公告)日：1998-03-24
申请号：US741843
申请日：1996-10-31
IPC分类号： B01D53/22 , B01D53/68 , B01D61/58 , B01D71/14 , B01D71/26 , B01D71/30 , B01D71/64 , B01D47/00 , B01D53/04
CPC分类号： B01D53/22 , B01D2257/204 , B01D2257/206
摘要： A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by contact of the gas stream with a membrane, comprising the steps of: compressing a gas stream containing a diluent gas and fluorochemicals to an elevated pressure; heating the gas stream containing a diluent gas and fluorochemicals to an elevated temperature sufficient to increase the flux of the permeate stream and to increase the selectivity of the membrane for the permeation of the diluent gas relative to the permeation of the fluorochemicals; contacting the gas stream with a membrane which is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in the diluent gas and a retentate rich in fluorochemicals; contacting the gas stream with one or more additional membranes which are selectively more permeable to the diluent gas than the fluorochemicals to result in a second permeate stream rich in the diluent gas and a second retentate rich in fluorochemicals; and recycling the second permeate stream to be compressed with the gas stream containing diluent gas and fluorochemicals to an elevated pressure. Preferably, the second retentate rich in fluorochemicals is further purified by adsorption or low temperature rectification to provide a fluorochemical-rich product stream and a diluent-rich vent stream.
摘要翻译： 一种通过气流与膜接触从含有稀释气体和含氟化合物的气流分离和回收含氟化合物的方法，包括以下步骤：将含有稀释气体和含氟化合物的气流压缩至升高的压力; 将含有稀释气体和含氟化合物的气流加热至足以增加渗透物流通量的升高温度，并增加膜相对于含氟化合物渗透的稀释气体渗透的选择性; 使气流与薄膜接触，该膜比稀释气体选择性地比含氟化合物更可渗透，导致富含稀释气体的渗透物流和富含氟化合物的渗余物; 使气流与一种或多种另外的膜接触，所述另外的膜比氟化合物选择性地对稀释气体更具渗透性，以产生富含稀释气体的第二渗透物流和富含氟化合物的第二渗余物; 以及将含有稀释气体和含氟化合物的气流再压缩成待压缩的第二渗透物流至升高的压力。 优选地，富含氟化合物的第二滞留物通过吸附或低温精馏进一步纯化以提供富含氟化合物的产物流和富含稀释剂的排气流。
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