公开(公告)号：US20080298945A1

公开(公告)日：2008-12-04

申请号：US12129346

申请日：2008-05-29

申请人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

发明人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

IPC分类号： B66C23/18

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10T74/20305

摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.

摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。

公开(公告)号：US08016542B2

公开(公告)日：2011-09-13

申请号：US12129346

申请日：2008-05-29

申请人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

发明人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

IPC分类号： B25J18/00

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10T74/20305

摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.

摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。