公开(公告)号：US20110315080A1

公开(公告)日：2011-12-29

申请号：US13254375

申请日：2010-03-04

申请人： Myong-Ho Choi ,  Jin-Sung Park ,  Jin-Chul Park ,  Ji-Suk Jang

发明人： Myong-Ho Choi ,  Jin-Sung Park ,  Jin-Chul Park ,  Ji-Suk Jang

IPC分类号： C23C16/458 ,  C23C16/50 ,  C23C16/455

CPC分类号： H01L21/68742

摘要： In a lift pin and an apparatus for processing a substrate having the same, the lift pin includes a body inserted into a penetration hole of a susceptor on which the substrate is positioned and moving along the penetration hole upward and downward in a direction vertical to an upper surface of the susceptor, and a contact member secured to an upper portion of the body and comprising a soft material having hardness smaller than that of the substrate. Thus, the contact member of the lift pin makes contact with the substrate without scratches on a surface of the substrate, to thereby reduce substrate failures in the process.

摘要翻译： 在提升销和用于处理具有该基座的基板的装置中，提升销包括插入到基座的贯穿孔中的主体，基座位于该基座的贯通孔中，并沿垂直于 基座的上表面和固定到主体的上部的接触构件，并且包括具有小于基底的硬度的软质材料。 因此，提升销的接触构件在基板的表面上与基板​​接触而没有划痕，从而减少了该过程中的基板故障。