公开(公告)号：US07772135B2

公开(公告)日：2010-08-10

申请号：US11601689

申请日：2006-11-20

Applicant: Fang-Tsun Chu ,  Jla-Xing Lin

Inventor： Fang-Tsun Chu ,  Jla-Xing Lin

IPC: H01L21/00

CPC classification number: H01L21/02532 ,  H01L21/0268 ,  Y10T117/1016

Abstract: A method for forming a poly-silicon film, using sequential lateral solidification (SLS) by laser irradiation through an optical device to pattern the laser beam and provide a periodic energy profile on the edges of transparent regions so as to widen the poly-silicon grains and achieve grain size uniformity. The optical device comprises a plurality of first transparent regions with a length of L, wherein at least one side of the edge of each of the first transparent regions has a first periodic shape.

Abstract translation: 一种用于通过激光照射通过光学装置使用顺序横向固化（SLS）来形成多晶硅膜的方法，以对激光束进行图案化并在透明区域的边缘上提供周期性能量分布，以便加宽多晶硅颗粒 并达到晶粒尺寸均匀性。 光学装置包括长度为L的多个第一透明区域，其中每个第一透明区域的边缘的至少一侧具有第一周期性形状。

公开(公告)号：US20070269993A1

公开(公告)日：2007-11-22

申请号：US11601689

申请日：2006-11-20

Applicant: Fang-Tsun Chu ,  Jla-Xing Lin

Inventor： Fang-Tsun Chu ,  Jla-Xing Lin

IPC: H01L21/00

CPC classification number: H01L21/02532 ,  H01L21/0268 ,  Y10T117/1016

Abstract: A method for forming a poly-silicon film, using sequential lateral solidification (SLS) by laser irradiation through an optical device to pattern the laser beam and provide a periodic energy profile on the edges of transparent regions so as to widen the poly-silicon grains and achieve grain size uniformity. The optical device comprises a plurality of first transparent regions with a length of L, wherein at least one side of the edge of each of the first transparent regions has a first periodic shape.

Abstract translation: 一种用于通过激光照射通过光学装置使用顺序横向固化（SLS）来形成多晶硅膜的方法，以对激光束进行图案化并在透明区域的边缘上提供周期性能量分布，以便加宽多晶硅颗粒 并达到晶粒尺寸均匀性。 光学装置包括长度为L的多个第一透明区域，其中每个第一透明区域的边缘的至少一侧具有第一周期性形状。