公开(公告)号：US06765469B2

公开(公告)日：2004-07-20

申请号：US10080252

申请日：2002-02-21

Applicant: John E. Sortor

Inventor： John E. Sortor

IPC: H01F500

CPC classification number: H03F3/604 ,  H01F19/04 ,  H01F27/2804 ,  H01P5/10 ,  H01P5/12 ,  H03F2200/534 ,  H03F2200/541

Abstract: One configuration of the present invention is a radio frequency transformer board that has a planar dielectric substrate having a first surface, an opposite second surface, and a transformer. The transformer includes a first elongate conductor disposed on the first surface and having a first end and a second end, a second elongate conductor disposed on the second surface and having a first end and a second end. The first end of the first conductor and the second end of the second conductor are disposed proximate an edge of the substrate and spaced apart from one another along the edge. The second end of the first conductor and the first end of the second conductor are electrically shorted to one another proximate the edge of the substrate.

Abstract translation: 本发明的一个结构是一种射频变压器板，其具有具有第一表面，相对的第二表面和变压器的平面电介质基板。 变压器包括设置在第一表面上并具有第一端和第二端的第一细长导体，设置在第二表面上并具有第一端和第二端的第二细长导体。 第一导体的第一端和第二导体的第二端设置在衬底的边缘附近并且沿着边缘彼此间隔开。 第一导体的第二端和第二导体的第一端在衬底的边缘彼此电短路。

公开(公告)号：US06703080B2

公开(公告)日：2004-03-09

申请号：US10151425

申请日：2002-05-20

Applicant: Leonid E. Reyzelman ,  John E. Sortor

Inventor： Leonid E. Reyzelman ,  John E. Sortor

IPC: B05D100

CPC classification number: H01J37/32174 ,  H01J37/32082 ,  H05H1/46

Abstract: A radio frequency (RF) generator apparatus for a plasma processing system that is resistant to nonlinear load mismatch conditions is provided. The apparatus includes an RF oscillator configured to generate an RF signal, an RF amplifier responsive to the RF signal to produce a VHF RF signal having sufficient power to drive a plasma chamber load, and a VHF-band circulator coupled to the amplifier and configured to isolate nonlinearities of the plasma chamber load from the amplifier.

Abstract translation: 提供了一种耐非线性负载失配条件的等离子体处理系统的射频（RF）发生器装置。 该装置包括被配置为产生RF信号的RF振荡器，响应于RF信号的RF放大器以产生具有足够功率来驱动等离子体室负载的VHF RF信号，以及耦合到放大器的VHF频带循环器， 隔离放大器等离子体室负载的非线性。