公开(公告)号：US07024925B2

公开(公告)日：2006-04-11

申请号：US10726759

申请日：2003-12-03

申请人： Dae Gab Gweon ,  Dong Min Kim ,  Jong Yeop Shim ,  Ki Hyun Kim

发明人： Dae Gab Gweon ,  Dong Min Kim ,  Jong Yeop Shim ,  Ki Hyun Kim

IPC分类号： G12B21/22 ,  G01N13/16 ,  B25J19/04 ,  H02N2/04

CPC分类号： B23Q1/34 ,  B23Q1/626 ,  B23Q2210/002 ,  G01N2035/00237

摘要： A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of the X-axis, the Y-axis or the Z-axis of rectangular coordinates. The 3-axis straight-line motion stage comprises a bottom plate 40 having a predetermined area and thickness; a X-axis stage 10 fixed in a reference area RR of the bottom plate 40 for moving in the direction of the X-axis a first X area RX1 positioned from the reference RR to the direction of the X-axis; a Y-axis stage 20 positioned within the first X area RX1 and fixed in a second X area RX2, which is located within the first X area RX1 for moving in the direction of the Y-axis a second Y area RY1 positioned from the second X area to the direction of the Y-axis; and a Z-axis stage 30 fixed in the second Y area RY2, which is located within the first Y area RY1 and supporting a predetermined sample for moving the sample in the direction of the Z-axis.

摘要翻译： 3轴直线运动台和使用该样本测试装置的样品测试装置，用于支撑预定样品，并且包括X轴，Y轴和Z轴级，用于在X方向上独立且精确地移动样本 轴，Y轴或Z坐标轴。 3轴直线运动台包括具有预定面积和厚度的底板40; 固定在底板40的参考区域RR中的X轴平台10，用于沿X轴方向移动从基准RR定位到X轴方向的第一X区域RX 1; 位于第一X区域RX 1内且固定在位于第一X区域RX 1内的第二X区域RX 1中的Y轴平台20，用于沿Y轴方向移动第二Y区域RY 1 从第二X区域到Y轴的方向; 以及固定在位于第一Y区域RY 1内的第二Y区域RY 2中并支撑用于沿Z轴方向移动样本的预定样本的Z轴平台30。