Apparatus for measuring ions in a clean room gas flow using a spherical
electrode
    1.
    发明授权
    Apparatus for measuring ions in a clean room gas flow using a spherical electrode 失效
    用于使用球形电极测量洁净室气流中的离子的装置

    公开(公告)号:US5506507A

    公开(公告)日:1996-04-09

    申请号:US122931

    申请日:1993-09-17

    IPC分类号: G01N27/60 G01N27/62

    CPC分类号: G01N27/62

    摘要: An apparatus for measuring ions in a gas which has a sensor around which the gas flows, the ions giving off their charge and giving rise to a current. The sensor is constructed as an electrode with a flow-favorable shape, such as a sphere. A fixed voltage is impressed on the electrode and the current produced at the electrode is measured, evaluated in a circuit and constitutes a measure for the ion count.

    摘要翻译: 一种用于测量气体中的离子的装置,其具有气体流过的传感器,离子释放其电荷并引起电流。 传感器被构造为具有流动良好形状的电极,例如球体。 在电极上施加固定电压,并测量电极产生的电流,并在电路中进行评估,并构成离子计数的度量。