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公开(公告)号:US5423207A
公开(公告)日:1995-06-13
申请号:US174948
申请日:1993-12-27
申请人: Karl A. Flechsig , Chih-Kung Lee , Sylvia L. Lee , Michael L. McGhee , Ullal V. Nayak , Timothy C. O'Sullivan , Josef Walian
发明人: Karl A. Flechsig , Chih-Kung Lee , Sylvia L. Lee , Michael L. McGhee , Ullal V. Nayak , Timothy C. O'Sullivan , Josef Walian
IPC分类号: G01B7/34 , G11B5/82 , G11B33/10 , H01L41/113 , G01B5/28 , H01L41/047 , H01L41/18
CPC分类号: G11B33/10 , G01B7/34 , H01L41/1132 , G11B5/82 , Y10S73/04
摘要: An enhanced piezoelectric sensor for detecting a predetermined bending mode frequency in the vibrational response of a slider with dimensions smaller than the conventional 100% slider during contact with one or more surface asperities on a recording surface. A method for making the enhanced sensor is also disclosed. The sensor comprises a substantiality rectangular slab of piezoelectric material having a charge response which corresponds to in-plane stress under free boundary conditions. Enhancement is achieved by partitioning an upper conductive layer along the lines of symmetry of the slider's stress distribution, which is related to the piezoelectric material's generated charge. In the preferred embodiment, the conductive layer is partitioned into two electrically isolated regions symmetric about the sensor's lateral axis. The design facilitates the isolation of a high frequency bending component which has been found to be monotonic with increasing surface asperity interference.
摘要翻译: 一种增强的压电传感器,用于在与记录表面上的一个或多个表面粗糙度接触期间检测尺寸小于常规100%滑块的滑块的振动响应中的预定弯曲模式频率。 还公开了一种用于制造增强型传感器的方法。 传感器包括具有对应于自由边界条件下的平面内应力的电荷响应的基本上矩形的压电材料板。 通过沿着与压电材料产生的电荷相关的滑块的应力分布的对称线分隔上导电层来实现增强。 在优选实施例中,导电层被划分成关于传感器的横向轴对称的两个电隔离区域。 该设计有助于高频弯曲部件的隔离,该部件已发现随着表面粗糙度的干扰增加而变得单调。