公开(公告)号：US06886951B2

公开(公告)日：2005-05-03

申请号：US10656775

申请日：2003-09-04

申请人： Harold Earl Bennett ,  Jack D. Westfall ,  Robert A. Taylor ,  Joseph Jasperson Shaffer ,  Earl La Fayette McFadden

发明人： Harold Earl Bennett ,  Jack D. Westfall ,  Robert A. Taylor ,  Joseph Jasperson Shaffer ,  Earl La Fayette McFadden

IPC分类号： G02B26/06 ,  G02B26/08 ,  G02B7/185 ,  G02B7/188 ,  H01L41/053

CPC分类号： G02B26/06 ,  G02B26/0825

摘要： A method and tool to smooth surface contours uses a fixed back plate mounted at a known distance to an actuator holding plate. Each of the actuators is mounted in said actuation holding plate by a support collar threaded into said actuator holding plate. Threaded with said support collar is an actuator holder with rigidly holds an actuator. A differential threaded adjustment device is then inserted through said fixed back plate and connected to say support collar and actuator holder so that each can be moved independently of the other. The actuator is made of two piezoelectric plates connected in parallel and separated by a silicon rubber o-ring.

摘要翻译： 用于平滑表面轮廓的方法和工具使用安装在致动器固定板的已知距离处的固定背板。 每个致动器通过螺纹连接到所述致动器保持板中的支撑轴环安装在所述致动保持板中。 带有所述支撑环的螺纹是具有刚性地保持致动器的致动器保持器。 然后将差速螺纹调节装置插入通过所述固定的背板并且连接到所述支撑轴环和致动器保持器，使得每个可以独立于彼此移动。 致动器由并联连接并由硅橡胶O形环分开的两个压电板制成。