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公开(公告)号：US4664767A
公开(公告)日：1987-05-12
申请号：US741526
申请日：1985-06-05
CPC分类号： H01J37/32935 , B01J19/088 , B29C59/14 , B29C2037/90
摘要： Herein disclosed are a plasma treating method and an apparatus therefor. The plasma treating method comprises: the step of monitoring the energies of plasmas corresponding to the faces of a plurality of samples to be treated; the step of adjusting to equalize the energies of said plasmas on the basis of the monitored values; and the step simultaneously treating said samples with the plasmas having said equalized energies. The plasma treating apparatus comprises: a plurality of sample electrodes disposed independently of one another in positions opposed to an opposed electrode in a treating chamber evacuated to be supplied with a treating gas; power supply means for applying and adjusting electric power to said sample electrodes; and monitor means for monitoring the energies of plasmas to be generated between said opposed electrode and said sample electrodes. The electric power to be applied independently of one another from a power supply to the independently formed plural sample electrodes are adjusted such that the energies of the plasmas to be generated between the opposed electrode and the sample electrodes are equalized, whereby the energy of the plasma corresponding to the respective treated faces of the plural samples are equalized so that the uniformity of the treatment of the respective faces of the plural samples to be simultaneously treated can be improved.
摘要翻译： 这里公开了一种等离子体处理方法及其装置。 等离子体处理方法包括：监测与待处理的多个样品的面对应的等离子体的能量的步骤; 基于所监测的值调整所述等离子体的能量的步骤; 以及用具有所述均衡能的等离子体同时处理所述样品的步骤。 等离子体处理装置包括：多个样品电极，彼此独立地设置在处理室中的与相对电极相对的位置，所述处理室被排出以供应处理气体; 用于对所述样品电极施加和调整电力的电源装置; 以及用于监测在所述相对电极和所述样品电极之间产生的等离子体能量的监视装置。 调节从电源向独立形成的多个样品电极彼此独立施加的电力，使得在相对电极和样品电极之间产生的等离子体的能量相等，由此等离子体的能量 对应于多个样品的各个处理面相对应，可以提高要同时处理的多个样品的各个面的处理的均匀性。
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