公开(公告)号：US06225809B1

公开(公告)日：2001-05-01

申请号：US09276467

申请日：1999-03-25

申请人： Satoru Watano ,  Katsuyuki Kamihashi ,  Teruo Suzuki ,  Kenshi Suzuki ,  Yasuo Morikawa

发明人： Satoru Watano ,  Katsuyuki Kamihashi ,  Teruo Suzuki ,  Kenshi Suzuki ,  Yasuo Morikawa

IPC分类号： G01N2762

CPC分类号： G01N27/60 ,  G01R29/12

摘要： A static electricity measuring system including a probe, a measuring device, and a calibration device. The probe includes a sensor which detects an electric field and outputs signals representing the detected electric field. The measuring device measures static electricity on the basis of the signals output from the sensor. The calibration device generates a reference electric field. The measuring device is adjusted when the sensor detects the reference electric field produced by the calibration device.

摘要翻译： 一种静电测量系统，包括探头，测量装置和校准装置。 探头包括检测电场并输出表示检测到的电场的信号的传感器。 测量装置根据传感器输出的信号测量静电。 校准装置产生参考电场。 当传感器检测到由校准装置产生的参考电场时，测量装置被调整。