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公开(公告)号：US20080291519A1
公开(公告)日：2008-11-27
申请号：US11889025
申请日：2007-08-08
申请人： Shigeo Maeda , Katushiko Tanaka , Akira Ishii , Susumu Sugiyama
发明人： Shigeo Maeda , Katushiko Tanaka , Akira Ishii , Susumu Sugiyama
CPC分类号： G02B26/0858 , G02B26/06 , Y10S359/90
摘要： Manufacturing method for variable shape mirrors suitable for mass production includes steps: for forming first grooves and second grooves along boundaries between areas to be variable shape mirrors on a surface of first wafer to be support substrate and a surface of second wafer to be mirror substrate; for arranging first and second wafer so that support pillars and piezoelectric elements are sandwiched between first and second wafer at areas with surface on which second grooves are formed facing inward for bonding; for dividing second wafer into mirror substrates by flattening process of outer surface of second wafer until at least reaching second groove; for dividing first wafer into the support substrates by breaking first wafer along first grooves; and for forming reflection film on outer surface of each of mirror substrates obtained by the dividing step.
摘要翻译： 适用于批量生产的可变形状镜的制造方法包括以下步骤：在待支撑衬底的第一晶片的表面上形成作为可变形状镜的区域之间的边界的第一槽和第二槽以及第二晶片作为镜衬底的表面; 用于布置第一和第二晶片，使得支撑柱和压电元件被夹在第一和第二晶片之间的表面处，其上形成有第二凹槽的面向内以用于粘合; 用于通过第二晶片的外表面的平坦化处理将第二晶片分成镜基板，直到至少到达第二凹槽; 用于通过沿第一凹槽断开第一晶片将第一晶片分成支撑基板; 并且用于在通过分割步骤获得的每个镜面基板的外表面上形成反射膜。
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公开(公告)号：US07635191B2
公开(公告)日：2009-12-22
申请号：US11889025
申请日：2007-08-08
申请人： Shigeo Maeda , Katushiko Tanaka , Akira Ishii , Susumu Sugiyama
发明人： Shigeo Maeda , Katushiko Tanaka , Akira Ishii , Susumu Sugiyama
CPC分类号： G02B26/0858 , G02B26/06 , Y10S359/90
摘要： Manufacturing method for variable shape mirrors suitable for mass production includes steps: for forming first grooves and second grooves along boundaries between areas to be variable shape mirrors on a surface of first wafer to be support substrate and a surface of second wafer to be mirror substrate; for arranging first and second wafer so that support pillars and piezoelectric elements are sandwiched between first and second wafer at areas with surface on which second grooves are formed facing inward for bonding; for dividing second wafer into mirror substrates by flattening process of outer surface of second wafer until at least reaching second groove; for dividing first wafer into the support substrates by breaking first wafer along first grooves; and for forming reflection film on outer surface of each of mirror substrates obtained by the dividing step.
摘要翻译： 适用于批量生产的可变形状镜的制造方法包括以下步骤：在待支撑衬底的第一晶片的表面上形成作为可变形状镜的区域之间的边界的第一槽和第二槽以及第二晶片作为镜衬底的表面; 用于布置第一和第二晶片，使得支撑柱和压电元件被夹在第一和第二晶片之间的表面处，其上形成有第二凹槽的面向内以用于粘合; 用于通过第二晶片的外表面的平坦化处理将第二晶片分成镜基板，直到至少到达第二凹槽; 用于通过沿第一凹槽断开第一晶片将第一晶片分成支撑基板; 并且用于在通过分割步骤获得的每个镜面基板的外表面上形成反射膜。
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公开(公告)号：US5046863A
公开(公告)日：1991-09-10
申请号：US610000
申请日：1990-11-07
CPC分类号： G11B5/53 , F16C17/02 , F16C17/026 , F16C17/10 , F16C33/102 , F16C33/107
摘要： A dynamic pressure bearing device induced a housing having a sleeve and a thrust receiver and a shaft fit into the sleeve. Herringbone-shaped grooves for generating dynamic pressure comprising outer groove segments and inner group segments are disposed to at least one of the inner cylindrical surface of the sleeve and the outer cylindrical surface of the shaft at two axially spaced apart positions. The axial length of the outer groove segment is longer than that of the inner groove segment, and the difference of the axial length for the outer and the inner groove segments is greater in the lower herringbone-shaped grooves than in the upper herringbone-shaped grooves.
摘要翻译： 动态压力承载装置引起具有套筒和推力接收器的壳体和装配到套筒中的轴。 用于产生包含外槽段和内组段的动压的人字形槽设置在套筒的内圆柱形表面和轴的外圆柱形表面中的至少一个在两个轴向间隔开的位置。 外槽段的轴向长度大于内槽段的轴向长度，并且外槽和内槽段的轴向长度差在下人字形槽中大于上人字形槽 。
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