公开(公告)号：US06497611B2

公开(公告)日：2002-12-24

申请号：US09767881

申请日：2001-01-24

申请人： Toshimichi Sakurada ,  Yasutoshi Fujita ,  Masao Yamaguchi ,  Kazuo Orii ,  Isao Saito

发明人： Toshimichi Sakurada ,  Yasutoshi Fujita ,  Masao Yamaguchi ,  Kazuo Orii ,  Isao Saito

IPC分类号： B24B4900

CPC分类号： B24B53/017 ,  B24B37/048 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/3163

摘要： Disclosed is a method of polishing a magnetic head slider whereby a by-processed step can be easily reduced. An air bearing surface of the magnetic head slider is polished with setting a bar that includes the magnetic head slider where a thin film magnetic head element is formed to reciprocate in a radius direction of a polishing plate, as well as rotating the polishing plate having a polishing surface. Polishing steps include a first polishing step of performing a height polish while rotating the polishing plate at a first velocity, and a second polishing step of performing a finishing polish while rotating the polishing plate at a second velocity sufficiently lower than the first velocity. The second velocity at the second polishing step is set so that an average linear velocity in the direction of the rotation of the polishing plate is equal to or lower than 0.032 m/s (preferably equal to or lower than 0.008 m/s). Consequently, the by-processed step that is generated on the air bearing surface of the magnetic head slider is reduced.