公开(公告)号：US07294951B2

公开(公告)日：2007-11-13

申请号：US11258816

申请日：2005-10-26

申请人： Keiichi Oouchi ,  Susumu Yoshida ,  Shuji Yamane

发明人： Keiichi Oouchi ,  Susumu Yoshida ,  Shuji Yamane

IPC分类号： H01L41/053

CPC分类号： H03H3/02 ,  H03B5/32 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/215 ,  Y10T29/42

摘要： A piezoelectric vibrator has a vibrator piece and a frame integral with the vibrator piece. The frame is connected to one end of and surrounds the vibrator piece. A lid has a surface anodically bonded to a first surface of the frame. The lid has a recessed portion at a position disposed opposite to and confronting the vibrator piece. A base has a surface anodically bonded to a second surface of the frame opposite the first surface thereof. The base has a recessed portion at a position disposed opposite to and confronting the vibrator piece. A beveled portion is formed around a surface of one of the lid and the base which does not correspond to the anodically bonded surface thereof.

摘要翻译： 压电振子具有振动片和与振动片成一体的框架。 框架连接到振动器片的一端并围绕振动片。 盖具有阳极结合到框架的第一表面的表面。 该盖在与振动片相对设置的位置处具有凹部。 底座具有阳极结合到框架的与其第一表面相对的第二表面的表面。 底座在与振动片相对设置的位置处具有凹部。 在与其阳极接合表面不对应的盖和基座中的一个的表面上形成有一个斜切部分。

公开(公告)号：US20060091765A1

公开(公告)日：2006-05-04

申请号：US11258816

申请日：2005-10-26

申请人： Keiichi Oouchi ,  Susumu Yoshida ,  Shuji Yamane

发明人： Keiichi Oouchi ,  Susumu Yoshida ,  Shuji Yamane

IPC分类号： H01L41/053

CPC分类号： H03H3/02 ,  H03B5/32 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/1035 ,  H03H9/215 ,  Y10T29/42

摘要： The present invention provides a piezoelectric vibrator which can sufficiently minimize the fluctuation of the oscillation frequency or the resonance resistance value even when a large static external force is applied to a package of the piezoelectric vibrator, a manufacturing method thereof, and an oscillator and an electronic equipment provided with the piezoelectric vibrator. In a manufacturing method of piezoelectric vibrators which manufactures a plurality of piezoelectric vibrators by applying anodic bonding to three wafers which are overlapped to each other with the first wafer sandwiched between the second wafer and the third wafer, and cutting the overlapped wafers at given positions, the manufacturing method includes, before a bonding step in which the anodic bonding is performed, a vibrator piece frame forming step which integrally forms vibrator pieces and frames which are connected to one ends of the vibrator pieces and surround the vibrator pieces on the first wafer, a first recessed portion forming step which forms first recessed portions on a bonding surface side of the second wafer, a second recessed portion forming step which forms second recessed portions on a bonding surface side of the third wafer, and a groove forming step in which a plurality of grooves are formed in a non-bonding surface side of at least one of the second wafer and the third wafer at given positions.

摘要翻译： 本发明提供一种压电振动器，其即使当对压电振动器的封装施加较大的静态外力时，也能充分地最小化振荡频率或谐振电阻值的波动，其制造方法以及振荡器和电子 设有压电振动器的设备。 在通过将第一晶片夹在第二晶片和第三晶片之间彼此重叠的三个晶片上施加阳极接合并且在给定位置切割重叠晶片的制造多个压电振动器的压电振动器的制造方法中， 该制造方法包括在执行阳极接合的接合步骤之前，将与振子片的一端连接并围绕第一晶片的振动片的振动片和框架一体地形成的振动片组件形成步骤， 在所述第二晶片的接合面侧形成第一凹部的第一凹部形成工序，在所述第三晶片的接合面侧形成第二凹部的第二凹部形成工序，以及槽形成工序， 在第二晶片和第二晶片中的至少一个的非结合面侧形成有多个槽 在给定位置的第三晶片。