公开(公告)号：US4760481A

公开(公告)日：1988-07-26

申请号：US888116

申请日：1986-07-22

申请人： Isamu Yuito ,  Eijin Moriwaki ,  Kazuo Shiiki ,  Keiko Shiokawa ,  Yoshihiro Hamakawa ,  Saburo Suzuki ,  Harunobu Saito

发明人： Isamu Yuito ,  Eijin Moriwaki ,  Kazuo Shiiki ,  Keiko Shiokawa ,  Yoshihiro Hamakawa ,  Saburo Suzuki ,  Harunobu Saito

IPC分类号： B07B13/02 ,  B07B13/18 ,  G11B5/31 ,  G11B5/20 ,  G11B5/12

CPC分类号： G11B5/3163

摘要： Disclosed is a thin film magnetic head having a structure wherein the main portion of a coil consists of a copper or copper alloy layer and its upper surface is covered with a thin film mask consisting of titanium, titanium oxide, chromium and/or chromium oxide. The magnetic head of the invention can prevent the occurrence of projecting etching residues at the upper edge portion of the coil and can easily increase the cross-sectional area and the winding density of the coil. Furthermore, when the thin film mask consists of titanium and/or titanium oxide, a titanium diffusion prevention film consisting of chromium, for example, is interposed between the thin film mask and the copper or copper alloy, so that the resistance change of the coil scarcely takes place owing to heat treatment in a production process after the formation of the coil and the head reliability can be further improved.

摘要翻译： 公开了一种薄膜磁头，其结构是线圈的主要部分由铜或铜合金层组成，其上表面被由钛，氧化钛，铬和/或氧化铬组成的薄膜掩模覆盖。 本发明的磁头可以防止在线圈的上边缘部分产生突出的蚀刻残留物，并且可以容易地增加线圈的横截面面积和卷绕密度。 此外，当薄膜掩模由钛和/或氧化钛组成时，例如由铬组成的钛扩散防止膜插入在薄膜掩模和铜或铜合金之间，使得线圈的电阻变化 由于在线圈形成后的生产过程中的热处理几乎不发生，并且可以进一步提高头的可靠性。