公开(公告)号：US20100107974A1

公开(公告)日：2010-05-06

申请号：US12266317

申请日：2008-11-06

申请人： Michael Givens ,  Mike Halpin ,  Matthew G. Goodman ,  Keir Kosco

发明人： Michael Givens ,  Mike Halpin ,  Matthew G. Goodman ,  Keir Kosco

IPC分类号： B05C13/02

CPC分类号： H01L21/68735 ,  H01L21/67103 ,  H01L21/67115 ,  H01L21/68785

摘要： A substrate support system comprises a substrate holder for supporting a substrate. The substrate holder comprises an interior portion sized and shaped to extend beneath most or all of a substrate supported on the substrate holder. The substrate holder has mass density that varies, preferably in order to compensate for variations in substrate temperature owing to surface geometry variations of the interior portion, so as to provide a more uniform thermal coupling between the substrate and substrate holder. The substrate holder is preferably configured to be spaced further apart from a substrate at the center than at the outer perimeter.

摘要翻译： 衬底支撑系统包括用于支撑衬底的衬底支架。 衬底保持器包括尺寸和形状以在支撑在衬底保持器上的基底的大部分或全部下延伸的内部部分。 衬底保持器具有变化的质量密度，优选地为了补偿由于内部部分的表面几何形状变化引起的衬底温度的变化，从而在衬底和衬底保持器之间提供更均匀的热耦合。 衬底保持器优选地构造成在中心处比在外周距离衬底更远地分开。