公开(公告)号：US09395324B2

公开(公告)日：2016-07-19

申请号：US13994584

申请日：2010-12-14

申请人： Anis Zribi ,  Ken Mott

发明人： Anis Zribi ,  Ken Mott

IPC分类号： G01N27/407

CPC分类号： G01N27/4074

摘要： A thin film/MEMS electrochemical gas sensor includes a body having first and second joined subassemblies to form an interior portion of the body, and is composed of a semiconductor material. The body includes at least one opening configured to allow air to pass into the interior portion of the body. A membrane stack is located in the interior of the body, producing an electrical signal that represents a concentration of target gas in the air at the membrane stack. Conductive contacts are configured to provide electrical connection to the membrane stack to access the electrical signal produced by the membrane stack.

摘要翻译： 薄膜/ MEMS电化学气体传感器包括具有第一和第二接合子组件的主体，以形成主体的内部部分，并由半导体材料构成。 主体包括构造成允许空气进入身体内部的至少一个开口。 膜堆叠位于主体的内部，产生一个电信号，表示膜叠层空气中目标气体的浓度。 导电触头被构造成提供与膜堆叠的电连接以访问由膜堆产生的电信号。

公开(公告)号：US20130277217A1

公开(公告)日：2013-10-24

申请号：US13994584

申请日：2010-12-14

申请人： Anis Zribi ,  Ken Mott

发明人： Anis Zribi ,  Ken Mott

IPC分类号： G01N27/407

CPC分类号： G01N27/4074

摘要： A thin film/MEMS electrochemical gas sensor includes a body having first and second joined subassemblies to form an interior portion of the body, and is composed of a semiconductor material. The body includes at least one opening configured to allow air to pass into the interior portion of the body. A membrane stack is located in the interior of the body, producing an electrical signal that represents a concentration of target gas in the air at the membrane stack. Conductive contacts are configured to provide electrical connection to the membrane stack to access the electrical signal produced by the membrane stack.

摘要翻译： 薄膜/ MEMS电化学气体传感器包括具有第一和第二接合子组件的主体，以形成主体的内部部分，并由半导体材料构成。 主体包括构造成允许空气进入身体内部的至少一个开口。 膜堆叠位于主体的内部，产生一个电信号，表示膜叠层空气中目标气体的浓度。 导电触头被构造成提供与膜堆叠的电连接以访问由膜堆产生的电信号。