公开(公告)号：US06901685B2

公开(公告)日：2005-06-07

申请号：US10693236

申请日：2003-10-24

申请人： Kensuke Yamaguchi ,  Yoshinori Ishikawa ,  Ki Han

发明人： Kensuke Yamaguchi ,  Yoshinori Ishikawa ,  Ki Han

IPC分类号： B08B3/08 ,  B08B3/02 ,  C23G3/00 ,  F26B5/00 ,  H01L21/00 ,  H01L21/304 ,  F26B3/00

CPC分类号： H01L21/67034 ,  B08B3/02 ,  Y10S134/902

摘要： A method for drying washed objects which is capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects, and preventing energy loss. The apparatus for carrying on the method of drying washed objects includes a drying tank having an opening on the upper portion thereof so that the washed objects can be placed or taken out from above, and a rinsing tank formed integrally with the drying tank, and is capable of being sealed hermetically by closing an openable and closable lid. The drying tank includes a mist-straightening vane for supplying organic solvent mist at normal temperatures to the washed objects, so that the washed objects are dried by organic solvent mist emitted from the mist-straightening vane.

摘要翻译： 一种用于干燥洗涤物体的方法，其能够在减少的时间内干燥物体，有效地防止物体的污染，并防止能量损失。 用于进行干燥洗涤物体的方法的装置包括：干燥箱，其上部具有开口，使得洗涤物体可以从上方放置或取出，以及与干燥箱一体形成的漂洗槽，并且是 能够通过关闭可打开和关闭的盖子来密封密封。 干燥箱包括用于在常温下向洗涤物体供给有机溶剂雾的雾化矫正叶片，使得被洗涤物体被从雾化矫正叶片发出的有机溶剂雾干燥。

公开(公告)号：US06779534B2

公开(公告)日：2004-08-24

申请号：US10235069

申请日：2002-09-04

申请人： Kensuke Yamaguchi ,  Yoshinori Ishikawa ,  Ki Han

发明人： Kensuke Yamaguchi ,  Yoshinori Ishikawa ,  Ki Han

IPC分类号： B08B500

CPC分类号： H01L21/67034 ,  B08B3/02 ,  Y10S134/902

摘要： An apparatus and a method for drying washed objects being capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects, and preventing energy loss are provided. The apparatus for drying washed objects includes a drying tank having an opening on the upper portion thereof so that the washed objects can be placed or taken out from above, and a rinsing tank formed integrally with the drying tank, and is capable of being sealed hermetically by closing the openable and closable lid. The drying tank includes a mist-straightening vane for supplying organic solvent mist at normal temperatures to the washed objects, so that the washed objects are dried by organic solvent mist emitted from the mist-straightening vane.

摘要翻译： 提供了能够在减少的时间内干燥被洗涤物体的设备和方法，有效地防止物体的污染，并防止能量损失。 用于干燥洗涤物体的设备包括：干燥箱，其上部具有开口，使得洗涤物体可从上方放置或取出，以及与干燥箱一体形成的冲洗槽，并且能够密封地密封 通过关闭可开启和关闭的盖子。 干燥箱包括用于在常温下向洗涤物体供给有机溶剂雾的雾化矫正叶片，使得被洗涤物体被从雾化矫正叶片发出的有机溶剂雾干燥。