公开(公告)号：US08291935B1

公开(公告)日：2012-10-23

申请号：US12384623

申请日：2009-04-07

申请人： Neil J. Merritt ,  Kevin D. Jennings ,  George A. Gilbert ,  David E. Bowser ,  Sooyun Joh

发明人： Neil J. Merritt ,  Kevin D. Jennings ,  George A. Gilbert ,  David E. Bowser ,  Sooyun Joh

IPC分类号： F16K11/20

CPC分类号： F16K27/003 ,  H01L21/67017 ,  Y10T137/87249 ,  Y10T137/8766

摘要： Each of plurality of gas sources flows to a different one of a plurality of separate source gas flow paths. Then, a source gas is distributed directly from each of plurality of separate source gas flow paths to a plurality of separate gas mixture flow paths, thereby distributing a plurality of source gases to each of different flow paths. A plurality of separate gas mixture streams is generated by flowing a plurality of source gases in each of a plurality of separate gas mixture flow paths. In some embodiments, each of a plurality of separate source gas flow paths comprises a gas distribution duct, and each of a plurality of gas mixture flow paths comprises a gas mixing conduit. In some embodiments, a gas distribution duct includes a plurality of gas distribution ports and a gas source port connectable to a gas source. In some embodiments, a gas mixing conduit comprises a plurality of gas inlet holes, a gas mixing region, and a gas outlet hole. Each of the gas inlet holes is connectable to a gas distribution duct and is operable to conduct a source gas into the gas mixing region. A plurality of gases is mixed in the mixing region to form a gas mixture. A gas manifold is operable to mix a plurality of source gases in a plurality of gas mixing conduits to generate a plurality of gas mixtures having different gas compositions and flow rates.

摘要翻译： 多个气体源中的每一个流到多个单独的源气体流动路径中的不同的一个。 然后，源气体从多个单独的源气体流动路径中的每一个直接分配到多个单独的气体混合物流动路径，从而将多个源气体分配到每个不同的流动路径。 通过在多个单独的气体混合物流动路径中的每一个中流动多个源气体来产生多个单独的气体混合物流。 在一些实施例中，多个单独的源气体流动路径中的每一个包括气体分配管道，并且多个气体混合物流动路径中的每一个包括气体混合管道。 在一些实施例中，气体分配管道包括多个气体分配端口和可连接到气体源的气体源端口。 在一些实施例中，气体混合管道包括多个气体入口孔，气体混合区域和气体出口孔。 每个气体入口孔可连接到气体分配管道，并且可操作以将源气体导入气体混合区域。 在混合区域中混合多种气体以形成气体混合物。 气体歧管可操作以混合多个气体混合管道中的多个源气体，以产生具有不同气体组成和流速的多个气体混合物。