公开(公告)号：US06265324B1

公开(公告)日：2001-07-24

申请号：US09315234

申请日：1999-05-20

申请人： Tsuyoshi Tsutsui ,  Shunji Nakata ,  Yasuo Miyano ,  Koutarou Ogura

发明人： Tsuyoshi Tsutsui ,  Shunji Nakata ,  Yasuo Miyano ,  Koutarou Ogura

IPC分类号： H01L2131

CPC分类号： C23C14/042

摘要： A mask 11 for vapor deposition is made of glass. Through-holes 15 are formed in the glass mask 11 so that they make a prescribed pattern on the surface of a semiconductor substrate 4. The peripheral wall of the through-hole is tapered so that the opening face 15b from which evaporated atoms are introduced is larger than the opening face 15a facing the deposition surface of the semiconductor substrate. The evaporated metal atoms having flied aslant toward the opening face 15b from which the evaporated atoms are introduced can pass through the through-hole 14 so that the evaporated metal atoms are deposited on the deposition surface of the semiconductor substrate. A desired thin film pattern inclusive of an electrode pattern can be easily formed on the surface of a semiconductor substrate, thereby improving the production yield of a semiconductor device.

摘要翻译： 用于气相沉积的掩模11由玻璃制成。 在玻璃掩模11中形成通孔15，使得它们在半导体衬底4的表面上形成规定的图案。通孔的周壁是锥形的，使得引入蒸发原子的开口面15b为 大于面向半导体衬底的沉积表面的开口面15a。 向被引入蒸发原子的开口面15b倾斜倾斜的蒸发金属原子可以通过通孔14，使得蒸发的金属原子沉积在半导体衬底的沉积表面上。 可以容易地在半导体衬底的表面上形成包括电极图案的期望的薄膜图案，从而提高半导体器件的制造成品率。

公开(公告)号：US07413046B2

公开(公告)日：2008-08-19

申请号：US11533011

申请日：2006-09-19

申请人： Hiroyuki Okada ,  Koutarou Ogura

发明人： Hiroyuki Okada ,  Koutarou Ogura

IPC分类号： B62M29/00

CPC分类号： B62M27/02

摘要： A snowmobile includes an engine room accommodating an engine body, a steering shaft transferring a steering force generated by the steering of a handle to steering skis, and an assist motor accommodated in the engine room and assisting the steering force, wherein the assist motor is mounted to the steering shaft and located ahead of an uppermost portion of the engine body.

摘要翻译： 一种雪地车包括容纳发动机主体的发动机室，将由把手转向产生的转向力传递给转向滑雪板的转向轴和容纳在发动机室中的辅助电动机，辅助转向力，辅助电动机被安装 并且位于发动机主体的最上部的前方。

公开(公告)号：US20070284171A1

公开(公告)日：2007-12-13

申请号：US11533011

申请日：2006-09-19

申请人： Hiroyuki OKADA ,  Koutarou OGURA

发明人： Hiroyuki OKADA ,  Koutarou OGURA

IPC分类号： B62M27/02

CPC分类号： B62M27/02

摘要： A snowmobile includes an engine room accommodating an engine body, a steering shaft transferring a steering force generated by the steering of a handle to steering skis, and an assist motor accommodated in the engine room and assisting the steering force, wherein the assist motor is mounted to the steering shaft and located ahead of an uppermost portion of the engine body.

摘要翻译： 一种雪地车包括容纳发动机主体的发动机室，将由把手转向产生的转向力传递给转向滑雪板的转向轴和容纳在发动机室中的辅助电动机，辅助转向力，辅助电动机被安装 并且位于发动机主体的最上部的前方。