公开(公告)号：US06329611B1

公开(公告)日：2001-12-11

申请号：US09506331

申请日：2000-02-18

申请人： Tetsuya Abe ,  Kozo Terunuma

发明人： Tetsuya Abe ,  Kozo Terunuma

IPC分类号： G01L110

CPC分类号： G01G21/244 ,  G01G1/22

摘要： An apparatus for measuring weight of a substance placed within a substrate space which is subjected to sever conditions, including a measuring unit having a transducer and placed within a measuring space, a partition member provided between the measuring space and the substance space and having hole through which said measuring space is communicated with said substance space, a rod-like member extending through said hole formed in the partition member such that a first end of said force transferring member situates within said substance space and a second end of said force transferring member situates within said measuring space, a parallel link mechanism arranged within the measuring space and connected with the rod-like member, a magnetic fluid provided in a space within said hole such that said substance space and measuring space is isolated from each other in a liquid tight manner by means of said magnetic fluid, and a magnetic force generating unit producing a magnetic force such that said magnetic fluid is kept in position by said magnetic force.

摘要翻译： 一种用于测量放置在经受严格条件的基板空间内的物质的重量的装置，包括具有换能器并放置在测量空间内的测量单元，设置在测量空间和物质空间之间并具有孔穿过的分隔构件 所述测量空间与所述物质空间连通，杆状构件延伸穿过形成在分隔构件中的孔，使得所述力传递构件的第一端位于所述物质空间内，并且所述力传递构件的第二端位于 在所述测量空间内，平行连杆机构设置在所述测量空间内并与所述杆状构件连接，设置在所述孔内的空间中的磁性流体使得所述物质空间和测量空间彼此以液密方式隔离 通过所述磁性流体的方式，以及产生磁力的磁力产生单元 所述磁性流体通过所述磁力保持在适当的位置。