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公开(公告)号：US2803569A
公开(公告)日：1957-08-20
申请号：US39608853
申请日：1953-12-03
Applicant: HAROLD JACOBS , LEIBOWITZ JACK R , RAMSA ALEXANDER P
Inventor： HAROLD JACOBS , LEIBOWITZ JACK R , RAMSA ALEXANDER P
IPC: H01L21/225 , H01L21/263
CPC classification number: H01L21/2633 , H01L21/2252 , Y10S438/914
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