公开(公告)号：US06507060B2

公开(公告)日：2003-01-14

申请号：US09863950

申请日：2001-05-23

申请人： Tian-Ling Ren ,  Lin-Tao Zhang ,  Li-Tian Liu ,  Zhi-Jian Li

发明人： Tian-Ling Ren ,  Lin-Tao Zhang ,  Li-Tian Liu ,  Zhi-Jian Li

IPC分类号： H01L2976

CPC分类号： H01L28/56

摘要： A silicon based PT/PZT/PT sandwich structure is disclosed. A dielectric layer is formed over a semiconductor substrate. The dielectric layer preferably comprises a silicon dioxide layer. A first and the second conductive films are sequentially formed over the dielectric layer. A first ferroelectric film is formed over the first and second conductive films. A second ferroelectric film is formed over the first ferroelectric film. A third ferroelectric film is formed over the second ferroelectric film. The resulting structure is annealed. A third and fourth conductive films are sequentially formed over the third ferroelectric layer. The third and fourth conductive films are patterned.

公开(公告)号：US5510299A

公开(公告)日：1996-04-23

申请号：US253940

申请日：1994-06-03

申请人： Zhi-Jian Li ,  Xi-Qing Sun ,  Li-Tian Liu

发明人： Zhi-Jian Li ,  Xi-Qing Sun ,  Li-Tian Liu

IPC分类号： H02N1/00 ,  H01L21/302

CPC分类号： H02N1/004

摘要： A method for manufacturing a micro electro-static motor which is provided with a curved bearing structure for rotatably supporting the rotor of the micro electro-static motor in a line contact manner in order to reduce the frictional torque of the micromotor. The micro electro-static motor is also provided with four on-chip rotational speed detection devices to facilitate its rotational speed measurement and the closed-loop control of the rotational speed. The on-chip rotational speed detection devices are accomplished by forming four P-N junctions in a silicon substrate. The curved bearing structure can be accomplished by etching of a phosphosilicate glass/silicon oxide composite sacrificial layer to form a curved bearing opening due to the large difference of etch rates between the phosphosilicate glass and the silicon oxide in buffered HF and by forming a curved bearing in the curved bearing opening.

摘要翻译： 一种微型静电电动机的制造方法，其具有弯曲轴承结构，用于以线接触方式可旋转地支撑微型静电电动机的转子，以便减小微型电动机的摩擦转矩。 微静电马达还设有四个片上转速检测装置，以便于其转速测量和旋转速度的闭环控制。 片上转速检测装置通过在硅衬底中形成四个P-N结来实现。 弯曲的轴承结构可以通过蚀刻磷硅酸盐玻璃/氧化硅复合牺牲层来形成弯曲的轴承开口，这是由于磷硅玻璃与缓冲HF中的氧化硅之间的蚀刻速率差异大， 在弯曲的轴承开口。