MICROELECTROMECHANICAL SYSTEM
    1.
    发明申请
    MICROELECTROMECHANICAL SYSTEM 有权
    微电子系统

    公开(公告)号:US20100171575A1

    公开(公告)日:2010-07-08

    申请号:US12475392

    申请日:2009-05-29

    CPC classification number: H01H50/005 H01H2036/0093

    Abstract: The invention relates to microelectromechanical systems (MEMS), and more particularly, to MEMS switches using magnetic actuation. The MEMS switch may be actuated with no internal power consumption. The switch is formed in an integrated solid state MEMS technology. The MEMS switch is micron and/or nanoscale, very reliable and accurate. The MEMS switch can be designed into various architectures, e.g., a cantilever architecture and torsion architecture. The torsion architecture is more efficient than a cantilever architecture.

    Abstract translation: 本发明涉及微机电系统(MEMS),更具体地涉及使用磁致动的MEMS开关。 可以在没有内部功率消耗的情况下致动MEMS开关。 该开关形成一体的固态MEMS技术。 MEMS开关是微米和/或纳米级,非常可靠和准确。 MEMS开关可以设计成各种架构,例如悬臂架构和扭转架构。 扭转架构比悬臂结构更有效率。

    Microelectromechanical system
    2.
    发明授权
    Microelectromechanical system 有权
    微机电系统

    公开(公告)号:US08174342B2

    公开(公告)日:2012-05-08

    申请号:US12475392

    申请日:2009-05-29

    CPC classification number: H01H50/005 H01H2036/0093

    Abstract: The invention relates to microelectromechanical systems (MEMS), and more particularly, to MEMS switches using magnetic actuation. The MEMS switch may be actuated with no internal power consumption. The switch is formed in an integrated solid state MEMS technology. The MEMS switch is micron and/or nanoscale, very reliable and accurate. The MEMS switch can be designed into various architectures, e.g., a cantilever architecture and torsion architecture. The torsion architecture is more efficient than a cantilever architecture.

    Abstract translation: 本发明涉及微机电系统(MEMS),更具体地涉及使用磁致动的MEMS开关。 可以在没有内部功率消耗的情况下致动MEMS开关。 该开关形成一体的固态MEMS技术。 MEMS开关是微米和/或纳米级,非常可靠和准确。 MEMS开关可以设计成各种架构,例如悬臂架构和扭转架构。 扭转架构比悬臂结构更有效率。

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