公开(公告)号：US20010022499A1

公开(公告)日：2001-09-20

申请号：US09750740

申请日：2000-12-29

Applicant: M.D. COM Inc.

Inventor： Sadatoshi Inayoshi

IPC: H01J011/00

CPC classification number: H01J65/00 ,  B08B7/0057

Abstract: A dry cleaning device which uses a double-cylinder type dielectric barrier discharge lamp 10a, 10b as a ultraviolet source. An outside electrode 2 in a trough-like shape is tightly contacted with the outer tube 1a of a discharge container 1, reflecting the ultraviolet light and directs it toward a workpiece 40. A cover 3 covers the outside electrode 2 for insulation of the outside electrode 2 from the ozone. In the clearance between the outer tube 1a of the discharge container 1 and an N2 introduction tube, an inside electrode 6 in a net-like shape is accommodated, nitrogen (N2) gas is caused to flow through the clearance for cooling the lamp 10a, 10b.

Abstract translation: 使用双筒型电介质阻挡放电灯10a，10b作为紫外线源的干洗装置。 槽状的外部电极2与放电容器1的外管1a紧密接触，反射紫外线并将其引向工件40.盖3覆盖外部电极2，用于绝缘外部电极 2从臭氧。 在排出容器1的外管1a和N2导入管之间的间隙中，容纳网状的内部电极6，使氮（N 2）气体流过用于冷却灯10a的间隙， 10b。