公开(公告)号：US20110091661A1

公开(公告)日：2011-04-21

申请号：US12903455

申请日：2010-10-13

申请人： Kaoru Ito ,  Masumi Noguchi ,  Hideaki Tanaka ,  Hiroyuki Ikeda ,  Makoto Shimomura ,  Isao Tada ,  Nobuhiro Hayashi ,  Hagane Irikura

发明人： Kaoru Ito ,  Masumi Noguchi ,  Hideaki Tanaka ,  Hiroyuki Ikeda ,  Makoto Shimomura ,  Isao Tada ,  Nobuhiro Hayashi ,  Hagane Irikura

IPC分类号： H05H1/24 ,  C23C14/14

CPC分类号： C23C14/20 ,  B05D1/60 ,  B05D7/52 ,  C23C14/562 ,  H01G4/008 ,  H01G4/145 ,  H01G4/33 ,  H01G13/00

摘要： An apparatus for producing a multilayer sheet including a resin film, a vapor-deposited metal film and a vapor-deposited polymer film at a low cost and with excellent productivity is provided which comprises: a vacuum chamber which is made to be in a vacuum state by exhaust means; a feeding roller; a take up roller; a first to third rollers, first metal vapor deposition means for forming a first vapor-deposited metal film on one surface of a resin film at a periphery of the first roller; vapor deposition polymerization means for forming a vapor-deposited polymer film on the first vapor-deposited metal film by vapor deposition polymerization at a periphery of the second roller; and second metal vapor deposition means for forming the second vapor-deposited metal film on the other surface of the resin film at a periphery of the third roller.

摘要翻译： 提供一种以低成本和优异的生产率制造包括树脂膜，气相沉积金属膜和气相沉积聚合物膜的多层片材的设备，其包括：真空室，其被制成真空状态 用排气装置 喂料辊; 卷取辊; 第一至第三辊，第一金属蒸镀装置，用于在第一辊的周围在树脂膜的一个表面上形成第一蒸镀金属膜; 气相沉积聚合装置，用于在第二辊的周围通过气相沉积聚合在第一气相沉积金属膜上形成气相沉积聚合物膜; 以及第二金属蒸镀装置，用于在第三辊的周围在树脂膜的另一个表面上形成第二蒸镀金属膜。