公开(公告)号：US20050117866A1

公开(公告)日：2005-06-02

申请号：US10969148

申请日：2004-10-20

Applicant: Wounjhang Park ,  Jeong-Bong Lee ,  Mark Tinker ,  Ethan Schonbrun

Inventor： Wounjhang Park ,  Jeong-Bong Lee ,  Mark Tinker ,  Ethan Schonbrun

IPC: G02B6/122 ,  G02B6/10

CPC classification number: G02B6/1225 ,  B82Y20/00

Abstract: A device is described based on flexible photonic crystal, which is comprised of a periodic array of high index dielectric material embedded in a flexible polymer. Dynamic, real time tunability is achieved by the application of a variable force with a MEMS actuator or other means. The force induces changes in the crystal structure of the photonic crystal, and consequently modifies the photonic band structure. The concept was demonstrated by a theoretical investigation on the effect of mechanical stress on the anomalous refraction behavior of the flexible PC, and a very wide tunability in beam propagation direction was observed. Experimental studies on fabrication and characterizations of the flexible photonic crystal structures were also carried out. High quality flexible PC structures were fabricated by e-beam lithography and anisotropic etching processes.

Abstract translation: 基于柔性光子晶体描述了一种器件，其由嵌入柔性聚合物中的高折射率介电材料的周期性阵列组成。 通过使用MEMS致动器或其他手段施加可变力来实现动态，实时可调性。 力引起光子晶体的晶体结构的变化，从而改变光子带结构。 通过对机械应力对柔性PC的异常折射行为的影响的理论研究证明了该概念，并且观察到在波束传播方向上具有非常宽的可调谐性。 还进行了柔性光子晶体结构的制造和表征的实验研究。 通过电子束光刻和各向异性蚀刻工艺制造高质量的柔性PC结构。