公开(公告)号：US5468112A

公开(公告)日：1995-11-21

申请号：US131391

申请日：1993-10-05

申请人： Katsumi Ishii ,  Masao Takikawa

发明人： Katsumi Ishii ,  Masao Takikawa

IPC分类号： H01L21/673 ,  H01L21/677 ,  G01P13/00

CPC分类号： H01L21/68 ,  H01L21/6732 ,  H01L21/67769 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14

摘要： A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from the container and a sub-opening through which a wafer counter approaches the wafers. A plurality of slots are formed in the container to hold the wafers one by one at intervals. Each slot includes a pair of grooves which are formed in inner surfaces of both the side walls, have a V-shaped cross-section, and which divergently open toward a central portion of the container. One surface of each groove serves as a supporting surface on which a wafer is disposed substantially horizontal when the container is positioned such that the reference plane is horizontal. The supporting surfaces of the pair of grooves have a pair of converging portions which converge toward the second opening. A filling body, having an inner surface which is brought into contact with an edge portion of a wafer, is provided in each converging portion near the sub-opening. The inner surface of the filling body is determined so as to restrict a position of the wafer, such that the wafer can be positioned at the same height of the supporting surfaces of the pair of grooves.

摘要翻译： 用于存储多个半导体晶片的容器包括两个端壁和两个侧壁。 容器具有主开口，晶片通过该主开口插入或从容器中取出，以及子开口，晶片计数器通过该子开口接近晶片。 在容器中形成多个槽，以间隔地一个一个地保持晶片。 每个狭槽包括形成在两个侧壁的内表面中的一对凹槽，其具有V形横截面，并且朝向容器的中心部分向外敞开。 每个槽的一个表面用作支撑表面，当容器定位成使得参考平面是水平的时，晶片在该支撑表面上基本上水平布置。 一对槽的支撑面具有朝向第二开口会聚的一对会聚部。 在子开口附近的每个会聚部分设置有具有与晶片的边缘部分接触的内表面的填充体。 确定填充体的内表面以限制晶片的位置，使得晶片可以位于一对槽的支撑表面的相同高度处。