公开(公告)号：US4902977A

公开(公告)日：1990-02-20

申请号：US295720

申请日：1989-01-10

申请人： Michael B. Kenny ,  Larry R. Barnett ,  Richard W. Grow ,  J. Mark Baird

发明人： Michael B. Kenny ,  Larry R. Barnett ,  Richard W. Grow ,  J. Mark Baird

IPC分类号： G01L21/32

CPC分类号： G01L21/32

摘要： A gas ionization type vacuum gauge for testing the internal vacuum levels to below 10.sup.-6 torr is disclosed which uses a multipactor discharge means as the source for the electron current used to ionize residual gas molecules. The invention comprises an RF field enhancing cavity which can be constructed of high-vacuum-compatible materials, able to withstand bake-out microwave temperatures and a negatively biased ion collection wave, wire, or grid. A simple ceramic RF feed-through permits simple and noninvasive pressure measurements. The device can be made much smaller than conventional gauges.

摘要翻译： 公开了一种用于测试内部真空度至低于10 -6乇的气体离子型真空计，其使用多功能放电装置作为用于电离残余气体分子的电子电流源。 本发明包括RF场增强腔，其可由能够承受烘烤微波温度的高真空兼容材料和负偏压的离子采集波，线或栅格构成。 简单的陶瓷射频馈电允许简单和无创的压力测量。 该装置可以比传统的量规小得多。