摘要:
A method of processing waste gas exhausted from chemical vapor deposition equipment, which entails:a) contacting a waste gas containing viscous substances with a filtering aid agent,b) passing the waste gas containing the viscous substances exhausted from the chemical vapor deposition equipment, and which has been contacted with the filtering aid agent, through a filtering and dust collecting unit, whereby the viscous substances are condensed with the filtering aid agent on the filtering and dust collecting unit, andc) removing the condensed matter from the surface of the filter, thereby preventing clogging thereof.