Integrated circuit structure having regions of doping concentration
intermediate that of a substrate and a pocket formed therein
    1.
    发明授权
    Integrated circuit structure having regions of doping concentration intermediate that of a substrate and a pocket formed therein 失效
    集成电路结构,其掺杂浓度的区域与衬底和其中形成的凹穴的掺杂浓度中间

    公开(公告)号:US4205342A

    公开(公告)日:1980-05-27

    申请号:US898681

    申请日:1978-04-21

    摘要: A CMOS integrated circuit structure is provided having circuit elements which can function as high resistances or stable current sources. The circuit elements include a region of intermediate doping which has a surface concentration between that of a substrate and a homogeneous region of a doped pocket formed therein. The region of intermediate doping is formed by the vicinity of two pocket edges, these edges being separated by a distance which is substantially not greater than twice the length of the lateral diffusion of the doping of the pockets.

    摘要翻译: 提供了具有可以用作高电阻或稳定电流源的电路元件的CMOS集成电路结构。 电路元件包括中间掺杂的区域,其表面浓度介于衬底和其中形成的掺杂凹坑的均匀区域之间。 中间掺杂的区域由两个凹口边缘附近形成,这些边缘被分开的距离基本上不大于穴袋掺杂的横向扩散长度的两倍。