公开(公告)号：US20110005052A1

公开(公告)日：2011-01-13

申请号：US12879480

申请日：2010-09-10

申请人： Naoyuki TAJIRI ,  Akifumi Suzuki ,  Daisuke Honma

发明人： Naoyuki TAJIRI ,  Akifumi Suzuki ,  Daisuke Honma

IPC分类号： B23P6/00

CPC分类号： H01L21/67276 ,  Y10S414/135 ,  Y10T29/4973 ,  Y10T483/10 ,  Y10T483/11 ,  Y10T483/115 ,  Y10T483/12 ,  Y10T483/14

摘要： Disclosed is a method for replacing a process instrument in a processing apparatus, in which a target object is loaded by transfer mechanism into a processing unit and is subjected to a process by use of the process instrument. The method includes confirming that a process on the target object is finished in a processing unit designated as a process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start. The method further includes, when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer mechanism, canceling the operation prohibition state to allow the transfer mechanism to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.

摘要翻译： 公开了一种用于替换处理装置中的处理装置的方法，其中目标对象被传送机构加载到处理单元中并且通过使用处理装置进行处理。 该方法包括：在指定为处理工具更换对象的处理单元中确认目标对象上的处理结束，以及提供允许开始处理工具更换操作的信息。 该方法还包括：当指定为处理仪器更换对象的处理单元的快门关闭以执行处理仪器更换操作并且将操作禁止状态应用于传送机构时，取消操作禁止状态以允许传送 执行相对于未被指定为处理仪器替换目标的处理单元的加载/卸载操作的机构。

公开(公告)号：US20070183774A1

公开(公告)日：2007-08-09

申请号：US11656423

申请日：2007-01-23

申请人： Naoyuki Tajiri ,  Akifumi Suzuki ,  Daisuke Honma

发明人： Naoyuki Tajiri ,  Akifumi Suzuki ,  Daisuke Honma

IPC分类号： G03D5/00

CPC分类号： H01L21/67276 ,  Y10S414/135 ,  Y10T29/4973 ,  Y10T483/10 ,  Y10T483/11 ,  Y10T483/115 ,  Y10T483/12 ,  Y10T483/14

摘要： Disclosed is a method for replacing a process instrument in a processing apparatus, in which an target object is loaded by transfer means into a processing unit and is subjected to a process by use of the process instrument. The method includes confirming that a process on the target object is finished in a processing unit designated as a process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start. The method further includes, when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer means, canceling the operation prohibition state to allow the transfer means to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.

摘要翻译： 公开了一种用于替换处理装置中的处理装置的方法，其中目标对象通过传送装置加载到处理单元中并且通过使用处理装置进行处理。 该方法包括：在指定为处理工具更换对象的处理单元中确认目标对象上的处理结束，以及提供允许开始处理工具更换操作的信息。 该方法还包括：当指定为处理仪器更换对象的处理单元的快门关闭以执行处理仪器更换操作并且由此将操作禁止状态应用于传送装置时，取消操作禁止状态以允许传送 用于执行相对于未被指定为处理仪器替换目标的处理单元的加载/卸载操作的装置。

公开(公告)号：US08043200B2

公开(公告)日：2011-10-25

申请号：US12879480

申请日：2010-09-10

申请人： Naoyuki Tajiri ,  Akifumi Suzuki ,  Daisuke Honma

发明人： Naoyuki Tajiri ,  Akifumi Suzuki ,  Daisuke Honma

IPC分类号： B23Q3/155 ,  H01L21/677

CPC分类号： H01L21/67276 ,  Y10S414/135 ,  Y10T29/4973 ,  Y10T483/10 ,  Y10T483/11 ,  Y10T483/115 ,  Y10T483/12 ,  Y10T483/14

摘要： Disclosed is a method for replacing a process instrument in a processing apparatus, in which a target object is loaded by transfer mechanism into a processing unit and is subjected to a process by use of the process instrument. The method includes confirming that a process on the target object is finished in a processing unit designated as a process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start. The method further includes, when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer mechanism, canceling the operation prohibition state to allow the transfer mechanism to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.

摘要翻译： 公开了一种用于替换处理装置中的处理装置的方法，其中目标对象被传送机构加载到处理单元中并且通过使用处理装置进行处理。 该方法包括：在指定为处理工具更换对象的处理单元中确认目标对象上的处理结束，以及提供允许开始处理工具更换操作的信息。 该方法还包括：当指定为处理仪器更换对象的处理单元的快门关闭以执行处理仪器更换操作并且将操作禁止状态应用于传送机构时，取消操作禁止状态以允许传送 执行相对于未被指定为处理仪器替换目标的处理单元的加载/卸载操作的机构。

公开(公告)号：US07815558B2

公开(公告)日：2010-10-19

申请号：US11656423

申请日：2007-01-23

申请人： Naoyuki Tajiri ,  Akifumi Suzuki ,  Daisuke Honma

发明人： Naoyuki Tajiri ,  Akifumi Suzuki ,  Daisuke Honma

IPC分类号： B23Q3/155 ,  H01L21/677

CPC分类号： H01L21/67276 ,  Y10S414/135 ,  Y10T29/4973 ,  Y10T483/10 ,  Y10T483/11 ,  Y10T483/115 ,  Y10T483/12 ,  Y10T483/14

摘要： Disclosed is a method for replacing a process instrument in a processing apparatus, in which a target object is loaded by a transfer mechanism into a processing unit and is subjected to a process by use of the process instrument. The method includes confirming that a process on the target object is finished in a processing unit designated as a process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start. The method further includes, when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer mechanism, canceling the operation prohibition state to allow the transfer mechanism to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.

摘要翻译： 公开了一种用于替换处理装置中的处理装置的方法，其中目标对象被传送机构加载到处理单元中并且通过使用处理工具进行处理。 该方法包括：在指定为处理工具更换对象的处理单元中确认目标对象上的处理结束，以及提供允许开始处理工具更换操作的信息。 该方法还包括：当指定为处理仪器更换对象的处理单元的快门关闭以执行处理仪器更换操作并且将操作禁止状态应用于传送机构时，取消操作禁止状态以允许传送 执行相对于未被指定为处理仪器替换目标的处理单元的加载/卸载操作的机构。