公开(公告)号：US08785898B2

公开(公告)日：2014-07-22

申请号：US12951578

申请日：2010-11-22

申请人： Qi Li ,  Nianlong Song ,  Ding Liu

发明人： Qi Li ,  Nianlong Song ,  Ding Liu

IPC分类号： G01N15/06 ,  H01L27/00

CPC分类号： G01F23/292

摘要： A laser liquid level detection device is provided with linear optical magnification of a curved minor. The device includes a laser device, a CCD detecting device having a curved mirror and a CCD sensor and signal processing devices disposed in the laser device and the CCD detecting device. The laser device emits a laser beam to a surface level of a liquid, which reflects the beam to the CCD detecting device, and the curved mirror directs the reflected beam onto the CCD sensor. The shape of the curved mirror is determined by a polynomial curve function so as to linearly magnify a change in a height of the surface when the bounced beam reaches the CCD sensor. The liquid level detection device enables the position of the surface level of the liquid to be detectable in real time with high accuracy.

摘要翻译： 激光液位检测装置具有弯曲次要的线性光学放大率。 该装置包括激光装置，具有曲面镜的CCD检测装置和CCD传感器以及设置在激光装置和CCD检测装置中的信号处理装置。 激光装置将激光束发射到液体的表面水平，其将光束反射到CCD检测装置，并且弯曲的反射镜将反射光束引导到CCD传感器上。 曲面镜的形状由多项式曲线函数确定，以便当弹跳光束到达CCD传感器时线性放大表面高度的变化。 液位检测装置能够以高精度实时地检测液体的表面水平的位置。

公开(公告)号：US20120025112A1

公开(公告)日：2012-02-02

申请号：US12951578

申请日：2010-11-22

申请人： Qi LI ,  Nianlong Song ,  Ding Liu

发明人： Qi LI ,  Nianlong Song ,  Ding Liu

IPC分类号： G01F23/292

CPC分类号： G01F23/292

摘要： The present invention discloses a laser liquid level detection device with linear optical magnification of a curved minor, wherein two openings are disposed at a top of a single crystal furnace symmetrically, a laser device and a CCD detecting device are respectively disposed on the two openings, and signal processing devices are pre-disposed within the laser device and the CCD detecting device. In the liquid surface height detection method using the device of the present invention, a model is first established to simulate the laser propagating path, a polynomial curve function of the curved mirror satisfying the requirement is calculated, the prepared curved minor is then disposed in the CCD detecting device, the change in the height of the liquid surface of molten silicon may be reflected on a CCD sensor, and therefore the actual change in the height of the liquid surface of molten silicon may be calculated. When detecting a liquid surface using the laser liquid surface detection device of the present invention, the position of the liquid surface of the single crystal furnace can be detected in real time, the detection accuracy is improved, and the reading and writing of the signal is facilitated, with the advantages of high accuracy, short time for detection, low failure rate, and easy installation and operation.

摘要翻译： 本发明公开了一种具有弯曲次级线性光学倍率的激光液面检测装置，其中两个开口对称地设置在单晶炉的顶部，激光装置和CCD检测装置分别设置在两个开口上， 并且信号处理装置预先设置在激光装置和CCD检测装置内。 在使用本发明的装置的液面高度检测方法中，首先建立模拟激光传播路径的模型，计算出满足要求的曲面镜的多项式曲线函数，然后将准备好的弯曲次要物置于 CCD检测装置，可以在CCD传感器上反射熔融硅的液面的高度变化，因此可以计算出熔融硅的液面高度的实际变化。 当使用本发明的激光液面检测装置检测液面时，可以实时地检测单晶炉的液面的位置，提高检测精度，并且信号的读写是 方便，具有精度高，检测时间短，故障率低，安装运行方便等优点。