公开(公告)号：US5123282A

公开(公告)日：1992-06-23

申请号：US694709

申请日：1991-05-02

申请人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Takahiro Kudo ,  Akio Fujita ,  Hideo Tsukamoto ,  Nobuaki Kohno ,  Hideaki Kuwayama

发明人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Takahiro Kudo ,  Akio Fujita ,  Hideo Tsukamoto ,  Nobuaki Kohno ,  Hideaki Kuwayama

IPC分类号： G01L9/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10

CPC分类号： G01P15/097 ,  G01L9/0019 ,  G01P15/0802

摘要： A vibrating type pressure measuring device having good shock wave proof measuring characteristics, high frequency response, good temperature characteristics, and can be readily miniaturized, wherein pressure to be measured is applied to a silicon diaphragm provided in an internal vacant space of a housing, and a magnetic field is applied by a DC current magnetic field applying device to a vibrator beam arranged in the inside of the diaphragm, with a gap therebetween kept in vacuum, and fixed to the diaphragm at both ends, and detects the changes in natural frequency of the vibrator beam caused by the pressure to be measured. The diaphragm and/or vibrator beam are constructed so one or the other or both have rough or uneven surfaces so as to prevent any adhesion therebetween.

摘要翻译： 一种振动式压力测量装置，具有良好的抗震波测量特性，高频响应，良好的温度特性，并且可以容易地小型化，其中待测量的压力被施加到设置在壳体的内部空闲空间中的硅膜片，以及 通过直流电流磁场施加装置将磁场施加到布置在隔膜内部的振动子束，其间保持真空的间隙，并且固定在两端的隔膜上，并检测其自身频率的变化 由测量的压力引起的振动器光束。 隔膜和/或振动器梁被构造成一个或另一个或两者具有粗糙或不均匀的表面，以防止它们之间的任何粘附。