公开(公告)号：US20070129839A1

公开(公告)日：2007-06-07

申请号：US11393653

申请日：2006-03-31

Applicant: Osamu Tsubakida ,  Tatsuya Hayashi ,  Yuki Nishimura ,  Satoshi Ishimoto

Inventor： Osamu Tsubakida ,  Tatsuya Hayashi ,  Yuki Nishimura ,  Satoshi Ishimoto

IPC: G06F19/00

CPC classification number: G05B19/41865 ,  G05B2219/31443 ,  G05B2219/45031 ,  Y02P90/20

Abstract: In a system for controlling a semiconductor device manufacturing process, a recipe indicating a control condition for controlling processing in a semiconductor manufacturing apparatus is calculated by a computation performed using manufacturing data obtained in the semiconductor device manufacturing process and a predetermined algorithm, and when the recipe cannot be derived, an alternative recipe prepared beforehand is transmitted to a manufacturing management system for managing the semiconductor manufacturing apparatus. The alternative recipe may be derived using the predetermined algorithm by a recomputation in which input conditions are changed. When a recipe cannot be derived by the recomputation, a planned recipe with which semiconductor devices processed by the manufacturing process fall within specification values may be used as the alternative recipe.

Abstract translation: 在用于控制半导体器件制造工艺的系统中，通过使用在半导体器件制造工艺和预定算法中获得的制造数据执行的计算来计算表示用于控制半导体制造装置中的处理的控制条件的配方，并且当配方 不能导出，预先制备的替代方案被传送到用于管理半导体制造装置的制造管理系统。 可以使用预定算法通过重新计算来导出替代配方，其中输入条件被改变。 当通过重新计算不能导出配方时，可以使用由制造过程处理的半导体器件落入规格值内的计划配方作为替代配方。