公开(公告)号：US5733104A

公开(公告)日：1998-03-31

申请号：US516244

申请日：1995-08-17

申请人： Armin Conrad ,  Otto Ganschow

发明人： Armin Conrad ,  Otto Ganschow

IPC分类号： F04D19/04 ,  F04D25/00 ,  F04B25/00

CPC分类号： F04D19/046 ,  F04D25/00

摘要： A vacuum pump system for multi-stage gas inlet systems and including a pumping unit formed of a turbomolecular pump and one or several further pumps arranged downstream of the turbomolecular pump and the rotors of which are located on the same shaft as the rotor of the turbomolecular pump, and an additional intermittently operated dry running pump, which discharges against atmospheric pressure.

摘要翻译： 一种用于多级气体入口系统的真空泵系统，包括由涡轮分子泵形成的泵送单元和布置在涡轮分子泵下游的一个或多个另外的泵，其转子位于与涡轮分子泵的转子相同的轴上 泵和另外间歇运行的干运行泵，其排放大气压力。