公开(公告)号：US06838404B2

公开(公告)日：2005-01-04

申请号：US10044831

申请日：2002-01-09

申请人： Patrick J. Hentges ,  Laura H. Greene ,  Margaret Mary Pafford ,  Glenn Westwood ,  Walter G. Klemperer

发明人： Patrick J. Hentges ,  Laura H. Greene ,  Margaret Mary Pafford ,  Glenn Westwood ,  Walter G. Klemperer

IPC分类号： C23C18/00 ,  H01L39/24 ,  C04B35/50 ,  C04B35/51

CPC分类号： H01L39/2496 ,  C23C18/00

摘要： A method of making a superconducting structure includes depositing a metal alkoxide on a surface of a metal and hydrolyzing the metal alkoxide on the surface to form a pinhole-free film. The metal is a superconductor. The metal alkoxide may be a compound of formula (I): M4(OPrn)16  (I); where M is zirconium or hafnium, and the purity of the compound is at least 97% as measured by NMR spectroscopy.