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1.发明授权Method and apparatus using a closed loop controlled actuator for surface profilometry 有权使用闭环控制的执行器进行表面轮廓测量的方法和装置公开(公告)号：US06901677B2
公开(公告)日：2005-06-07
申请号：US10839384
申请日：2004-05-05
Applicant: Stuart T. Smith , Marcin B. Bauza , Pavan Jain , Shane C. Woody
Inventor： Stuart T. Smith , Marcin B. Bauza , Pavan Jain , Shane C. Woody
CPC classification number: G01B5/20 , G01B5/0002
Abstract: An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.
Abstract translation: 用于对工件的表面进行成形的装置，包括适于与工件的表面接触的探头，用于确定或导出探头和工件表面之间的力的传感器，调节探头沿着位置的致动器 通常垂直于工件表面的轴线，以便在探头和表面之间保持恒定的力，以及闭合的控制回路，包括控制器，其基于来自传感器的信息来控制致动器的操作 。
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2.再颁专利Method and apparatus using a closed loop controlled actuator for surface profilometry 有权使用闭环控制的执行器进行表面轮廓测量的方法和装置公开(公告)号：USRE41057E1
公开(公告)日：2009-12-29
申请号：US11398455
申请日：2006-04-05
Applicant: Stuart T. Smith , Marcin B. Bauza , Pavan Jain , Shane C. Woody
Inventor： Stuart T. Smith , Marcin B. Bauza , Pavan Jain , Shane C. Woody
CPC classification number: G01B5/20 , G01B5/0002
Abstract: An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.
Abstract translation: 用于对工件的表面进行成形的装置，包括适于与工件的表面接触的探头，用于确定或导出探头和工件表面之间的力的传感器，调节探头沿着位置的致动器 通常垂直于工件表面的轴线，以便在探头和表面之间保持恒定的力，以及闭合的控制回路，包括控制器，其基于来自传感器的信息来控制致动器的操作 。
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