公开(公告)号：US07907340B2

公开(公告)日：2011-03-15

申请号：US11924640

申请日：2007-10-26

申请人： Shaowei Wang ,  Wei Lu ,  Xiaoshuang Chen ,  Ning Li ,  Bo Zhang ,  Zhifeng Li ,  Pingping Chen

发明人： Shaowei Wang ,  Wei Lu ,  Xiaoshuang Chen ,  Ning Li ,  Bo Zhang ,  Zhifeng Li ,  Pingping Chen

IPC分类号： G02B1/10

CPC分类号： G02B5/28

摘要： Taught herein is an integragted narrow bandpass filter array and a method of its fabrication. The filter array is a Fabry-Perot type of filter array, wherein the pass band changes with the thickness of the spacer layer. The integrated filter array comprises a substrate, a lower mirror stack, a spacer array, and an upper mirror stack. The spacer array is an array of varied thicknesses formed using a combinatorial deposition technique. The spacer array is used to control the pass band of each mini-size narrow bandpass filter and realizes the integration of narrow bandpass filters with different pass bands on a single substrate. The merit of this technique lies in its fabrication efficiency and finished product rate which are much higher than for conventional methods. The filter array is completely matched with detector arrays and functional in most of the important optical ranges.

摘要翻译： 这里介绍的是一个集成窄带通滤波器阵列及其制造方法。 滤波器阵列是法布里 - 珀罗型的滤波器阵列，其中通带随间隔层的厚度而变化。 集成滤波器阵列包括衬底，下反射镜叠层，间隔物阵列和上反射镜叠层。 间隔物阵列是使用组合沉积技术形成的各种厚度的阵列。 间隔阵列用于控制每个小尺寸窄带通滤波器的通带，实现了单个衬底上具有不同通带的窄带通滤波器的集成。 这种技术的优点在于其制造效率和成品率都远高于传统方法。 滤波器阵列与检测器阵列完全匹配，并且在大多数重要的光学范围中起作用。

公开(公告)号：US20080042782A1

公开(公告)日：2008-02-21

申请号：US11924640

申请日：2007-10-26

申请人： Shaowei WANG ,  Wei LU ,  Xiaoshuang CHEN ,  Ning LI ,  Bo ZHANG ,  Zhifeng LI ,  Pingping CHEN

发明人： Shaowei WANG ,  Wei LU ,  Xiaoshuang CHEN ,  Ning LI ,  Bo ZHANG ,  Zhifeng LI ,  Pingping CHEN

IPC分类号： H03H9/00

CPC分类号： G02B5/28

摘要： Taught herein is an integragted narrow bandpass filter array and a method of its fabrication. The filter array is a Fabry-Perot type of filter array, wherein the pass band changes with the thickness of the spacer layer. The integrated filter array comprises a substrate, a lower mirror stack, a spacer array, and an upper mirror stack. The spacer array is an array of varied thicknesses formed using a combinatorial deposition technique. The spacer array is used to control the pass band of each mini-size narrow bandpass filter and realizes the integration of narrow bandpass filters with different pass bands on a single substrate. The merit of this technique lies in its fabrication efficiency and finished product rate which are much higher than for conventional methods. The filter array is completely matched with detector arrays and functional in most of the important optical ranges.

摘要翻译： 这里介绍的是一个集成窄带通滤波器阵列及其制造方法。 滤波器阵列是法布里 - 珀罗型的滤波器阵列，其中通带随间隔层的厚度而变化。 集成滤波器阵列包括衬底，下反射镜叠层，间隔物阵列和上反射镜叠层。 间隔物阵列是使用组合沉积技术形成的各种厚度的阵列。 间隔阵列用于控制每个小尺寸窄带通滤波器的通带，实现了单个衬底上具有不同通带的窄带通滤波器的集成。 这种技术的优点在于其制造效率和成品率都远高于传统方法。 滤波器阵列与检测器阵列完全匹配，并且在大多数重要的光学范围中起作用。