公开(公告)号：US06354910B1

公开(公告)日：2002-03-12

申请号：US09494705

申请日：2000-01-31

申请人： Richardson O. Adebanjo ,  William Graham Easter ,  Alvaro Maury ,  Frank Miceli ,  Jose Omar Rodriguez

发明人： Richardson O. Adebanjo ,  William Graham Easter ,  Alvaro Maury ,  Frank Miceli ,  Jose Omar Rodriguez

IPC分类号： B24B4900

CPC分类号： B24B37/11 ,  B24B49/02 ,  B24B53/017

摘要： A non-destructive method for measuring the thickness loss of a polishing pad due to pad conditioning includes the use of rigid planar members placed on the surfaces of both the conditioned and non-conditioned sections of the polishing pad. Measurements are made using measurement instruments which overhang the depressed conditioned section and measure the height difference between the upper surfaces of the planar members. The measurement instruments may be repositioned and measurements repeated to obtain an average thickness loss.

摘要翻译： 用于测量由于衬垫调节引起的抛光垫的厚度损失的非破坏性方法包括使用放置在抛光垫的调理部分和非调节部分的表面上的刚性平面部件。 使用测量仪器进行测量，该测量仪器伸出凹陷的调节部分并测量平面部件的上表面之间的高度差。 可以重新定位测量仪器并重复测量以获得平均厚度损失。