公开(公告)号：USRE37347E1

公开(公告)日：2001-09-04

申请号：US09612542

申请日：2000-07-07

申请人： Toshiro Maekawa ,  Ryuji Haraguchi

发明人： Toshiro Maekawa ,  Ryuji Haraguchi

IPC分类号： F26B1724

CPC分类号： H01L21/68728 ,  Y10S134/902

摘要： A substrate gripper device for gripping a substrate has a rotatable substrate stage, a plurality of fixing fingers vertically mounted on an outer edge of the rotatable substrate stage and having respective horizontal substrate rests for placing thereon an outer edge of the substrate, and a plurality of swing fingers angularly movably supported on the fixing fingers, respectively, for vertically gripping the substrate in coaction with the fixing fingers. The swing fingers are normally biased to move in a closing direction toward the fixing fingers, respectively, by helical springs acting on the swing fingers. A plurality of opening pins are vertically movably disposed below the swing fingers, respectively, and movable upwardly for angularly moving the swing fingers in the opening direction against biasing forces of the helical springs. An opening mechanism is vertically movably disposed below the substrate stage for simultaneously moving the opening pins upwardly.

摘要翻译： 用于夹持基板的基板夹持器装置具有可旋转的基板台，垂直地安装在可旋转基板台的外边缘上的多个固定指状物，并且具有各自的水平基板支架，用于在其上放置基板的外边缘，以及多个 分别用于以固定指状物方向可移动地支撑在所述固定指状物上的摆动指，用于垂直地夹持所述基板，并与所述固定指状物配合。 摆动指通常被偏置以通过作用在摆动指状物上的螺旋弹簧分别沿闭合方向朝着固定指状物移动。 多个开启销分别垂直地可移动地设置在摆动指状件的下方，并且可向上移动，用于使摆动指沿打开方向角度地移动以抵抗螺旋弹簧的偏压力。 垂直移动地设置在基底台下方的打开机构，用于同时向上移动开口销。

公开(公告)号：US5775000A

公开(公告)日：1998-07-07

申请号：US855361

申请日：1997-05-13

申请人： Toshiro Maekawa ,  Ryuji Haraguchi

发明人： Toshiro Maekawa ,  Ryuji Haraguchi

IPC分类号： H01L21/687 ,  F26B17/24

CPC分类号： H01L21/68728 ,  Y10S134/902

摘要： A substrate gripper device for gripping a substrate has a rotatable substrate stage, a plurality of fixing fingers vertically mounted on an outer edge of the rotatable substrate stage and having respective horizontal substrate rests for placing thereon an outer edge of the substrate, and a plurality of swing fingers angularly movably supported on the fixing fingers, respectively, for vertically gripping the substrate in coaction with the fixing fingers. The swing fingers are normally biased to move in a closing direction toward the fixing fingers, respectively, by helical springs acting on the swing fingers. A plurality of opening pins are vertically movably disposed below the swing fingers, respectively, and movable upwardly for angularly moving the swing fingers in the opening direction against biasing forces of the helical springs. An opening mechanism is vertically movably disposed below the substrate stage for simultaneously moving the opening pins upwardly.

摘要翻译： 用于夹持基板的基板夹持器装置具有可旋转的基板台，垂直地安装在可旋转基板台的外边缘上的多个固定指状物，并且具有各自的水平基板支架，用于在其上放置基板的外边缘，以及多个 分别用于以固定指状物方向可移动地支撑在所述固定指状物上的摆动指，用于垂直地夹持所述基板，并与所述固定指状物配合。 摆动指通常被偏置以通过作用在摆动指状物上的螺旋弹簧分别沿闭合方向朝着固定指状物移动。 多个开启销分别垂直地可移动地设置在摆动指状件的下方，并且可向上移动，用于使摆动指沿打开方向角度地移动以抵抗螺旋弹簧的偏压力。 垂直移动地设置在基底台下方的打开机构，用于同时向上移动开口销。